Polishing pad having abrasive grains and method for making the same

Abstract

The present invention relates to a polishing pad having abrasive grains and a method for making the same. The polishing pad having abrasive grains includes a plurality of fibers, a plurality of abrasive grains and a high polymer. The fibers intersect each other to form a fiber matrix. The abrasive grains are attached to the fibers. The high polymer covers the fibers and the abrasive grains. The abrasive grains will not easily scratch a surface of a workpiece to be polished due to the flexibility of the fibers.

1 . A polishing pad having abrasive grains, comprising:
 a plurality of fibers, intersecting each other to form a fiber matrix;   a plurality of abrasive grains, attached to the fibers; and   a high polymer, covering the fibers and the abrasive grains.   
     
     
         2 . The polishing pad according to  claim 1 , further comprising a bottom layer, wherein a second surface of the high polymer is disposed on the bottom layer. 
     
     
         3 . The polishing pad according to  claim 1 , wherein the fiber matrix is a non-woven fabric. 
     
     
         4 . The polishing pad according to  claim 1 , wherein the fibers are solid or hollow and the fibers are made of a material selected from a group consisting of a polyamide resin, polyethylene terephthalate (PET), polyester resin, nylon, polypropylene (PP), acrylic resin and polyacrylonitrile resin. 
     
     
         5 . The polishing pad according to  claim 1 , wherein the abrasive grains are disposed inside the fibers, and a portion of the abrasive grains are exposed to surfaces of the fibers. 
     
     
         6 . The polishing pad according to  claim 1 , wherein the abrasive grains are disposed on the surfaces of the fibers. 
     
     
         7 . The polishing pad according to  claim 1 , wherein the abrasive grains are made of a material selected from a group consisting of SiO 2 , CeO 2 , Al 2 O 3 , oxides of transition metals and oxides of Group IIA metals. 
     
     
         8 . The polishing pad according to  claim 1 , wherein the high polymer has a first surface and a second surface, and a portion of the fibers and a portion of the abrasive grains are exposed to the first surface. 
     
     
         9 . The polishing pad according to  claim 1 , wherein the high polymer is made of a material selected from a group consisting of a polyamide resin, polycarbonate, polymethacrylic resin, epoxy resin, phenol resin, polyurethane resin, vinylbenzene resin and acrylic resin. 
     
     
         10 . The polishing pad according to  claim 1 , wherein the high polymer is an intercommunicated porous high-polymeric elastomer resin. 
     
     
         11 . A method for making a polishing pad having abrasive grains, comprising:
 (a) providing a fiber matrix, wherein the fiber matrix has a plurality of fibers and a plurality of abrasive grains, the fibers intersect each other, and the abrasive grains are attached to the fibers;   (b) immersing the fiber matrix in a high-polymer solution; and   (c) performing a curing step, such that the fiber matrix is covered with a high polymer.   
     
     
         12 . The method according to  claim 11 , wherein Step (a) comprises:
 (a1) providing a fiber raw material, and performing a spinning step, such that the fiber raw material forms a plurality of fibers;   (a2) providing a plurality of abrasive grains, and attaching the abrasive grains to surfaces of the fibers; and   (a3) performing a drawing step, such that the fibers form the fiber matrix.   
     
     
         13 . The method according to  claim 12 , wherein in Step (a1), the spinning step is melt spinning, dry spinning or wet spinning. 
     
     
         14 . The method according to  claim 11 , wherein Step (a) comprises:
 (a1) providing a fiber raw material and a plurality of abrasive grains, and adding the abrasive grains into the fiber raw material;   (a2) performing a spinning step, such that the fiber raw material forms a plurality of fibers, wherein a portion of the abrasive grains are disposed inside the fibers, and a portion of the abrasive grains are exposed to the surfaces of the fibers; and   (a3) performing a drawing step, such that the fibers form the fiber matrix.   
     
     
         15 . The method according to  claim 14 , wherein in Step (a2), the spinning step is melt spinning, dry spinning or wet spinning. 
     
     
         16 . The method according to  claim 11 , wherein in Step (a), the fibers are solid or hollow. 
     
     
         17 . The method according to  claim 11 , wherein in Step (a), the abrasive grains are made of a material selected from a group consisting of SiO 2  CeO 2 , Al 2 O 3 , oxides of transition metals and oxides of Group IIA metals. 
     
     
         18 . The method according to  claim 11 , wherein in Step (a), the fiber matrix is a non-woven fabric, and is formed by chemical bonding, thermal bonding, mechanical bonding, dry carding, direct web-forming or wet web-forming. 
     
     
         19 . The method according to  claim 11 , wherein Step (c) further comprises a step of removing a portion of the high polymer, such that a portion of the fibers and a portion of the abrasive grains are exposed to a first surface of the high polymer. 
     
     
         20 . The method according to  claim 11 , wherein after Step (c), the method further comprises a step of forming a bottom layer on a second surface of the high polymer.