Method for manufacturing electro-optical device and apparatus for manufacturing electro-optical device

Abstract

A method for manufacturing an electro-optical device includes performing a discharge-scanning by moving a nozzle row including a plurality of discharge nozzles and a substrate including a plurality of functional film partitioned areas relative to each other in a direction perpendicular to an array direction of the discharge nozzles in the nozzle row and by selectively discharging liquid from the discharge nozzles to deposit the liquid in the film formation partitioned areas to form a functional film, and performing a secondary scanning by moving the substrate and the nozzle row relative to each other in the array direction. The performing of the secondary scanning includes performing a first secondary scanning at least once in which a relative movement distance between the nozzle row and the substrate is equal to an integral multiple of an arrangement pitch of the film formation partitioned areas in the array direction.

1 . A method for manufacturing an electro-optical device comprising:
 performing a discharge-scanning by moving a nozzle row including a plurality of discharge nozzles and a substrate including a plurality of functional film partitioned areas relative to each other in a direction perpendicular to an array direction of the discharge nozzles in the nozzle row and by selectively discharging liquid from the discharge nozzles to deposit the liquid in the film formation partitioned areas to form a functional film; and   performing a secondary scanning by moving the substrate and the nozzle row relative to each other in the array direction,   the performing of the secondary scanning including performing a first secondary scanning at least once in which a relative movement distance between the nozzle row and the substrate is equal to an integral multiple of an arrangement pitch of the film formation partitioned areas in the array direction.   
   
   
       2 . The method for manufacturing an electro-optical device according to  claim 1 , further comprising
 setting discharge drive conditions for each of the discharge nozzles so that the discharge drive conditions in the discharge-scanning performed after the first secondary scanning are set to the discharge drive conditions that are the same as the discharge drive conditions in the discharge-scanning carried out prior to the first secondary scanning.   
   
   
       3 . The method for manufacturing an electro-optical device according to  claim 2 , wherein
 the performing of the secondary scanning includes performing a second secondary scanning in which the relative movement distance per cycle is equal to an integral multiple of a nozzle pitch of the discharge nozzles in the nozzle row.   
   
   
       4 . The method for manufacturing an electro-optical device according to  claim 3 , wherein
 the setting of the discharge drive conditions includes setting the discharge drive conditions so that the discharge drive conditions performed after the second secondary scanning are set to the discharge drive conditions that are different than the discharge drive conditions carried out prior to the second secondary scanning.   
   
   
       5 . The method for manufacturing an electro-optical device according to  claim 1 , further comprising
 adjusting a spacing between a plurality of the nozzle rows in the array direction to be equal to an integral multiple of the arrangement pitch.   
   
   
       6 . The method for manufacturing an electro-optical device according to  claim 3 , further comprising
 adjusting a spacing between a plurality of the nozzle rows in the array direction to be equal to an integral multiple of the nozzle pitch.   
   
   
       7 . The method for manufacturing an electro-optical device according to  claim 1 , further comprising
 providing as the substrate a mother panel including a plurality of electro-optical panels each corresponding to a single electro-optical device so that a plurality of functional film formation regions of the electro-optical panel are arranged in the secondary scanning direction in an integral multiple of the arrangement pitch.   
   
   
       8 . An apparatus for manufacturing an electro-optical device comprising:
 a nozzle row including a plurality of discharge nozzles;   a movement mechanism configured and arranged to move the nozzle row and a substrate including a plurality of functional film partitioned areas relative to each other; and   a control section configured to control the movement mechanism and the nozzle row to perform a discharge-scanning by moving the nozzle row and the substrate relative to each other in a direction perpendicular to an array direction of the discharge nozzles in the nozzle row and by selectively discharging liquid from the discharge nozzles to deposit the liquid in the film formation partitioned areas to form a functional film, and to control the movement mechanism to perform a secondary scanning by moving the substrate and the nozzle row relative to each other in the array direction, the control section being configured to control the movement mechanism to perform a first secondary scanning in which a relative movement distance between the nozzle row and the substrate is equal to an integral multiple of an arrangement pitch of the film formation partitioned areas in the array direction.   
   
   
       9 . The apparatus for manufacturing an electro-optical device according to  claim 8 , further comprising
 a drive conditions setting section configured and arranged to set discharge drive conditions for each of the discharge nozzles so that the discharge drive conditions in the discharge-scanning performed after the first secondary scanning are set to the discharge drive conditions that are the same as the discharge drive conditions in the discharge-scanning carried out prior to the first secondary scanning.   
   
   
       10 . The apparatus for manufacturing an electro-optical device according to  claim 9 , wherein
 the control section is configured to control the movement mechanism to perform a second secondary scanning in which the relative movement distance per cycle is equal to an integral multiple of a nozzle pitch of the discharge nozzles in the nozzle row, and   the drive conditions setting section is configured to set the discharge drive conditions so that the discharge drive conditions performed after the second secondary scanning are set to the discharge drive conditions that are different than the discharge drive conditions carried out prior to the second secondary scanning.   
   
   
       11 . The apparatus for manufacturing an electro-optical device according to  claim 8 , further comprising
 a plurality of the nozzle rows with a spacing between the nozzle rows in the array direction is equal to an integral multiple of the arrangement pitch.   
   
   
       12 . The apparatus for manufacturing an electro-optical device according to  claim 10 , further comprising
 a plurality of the nozzle rows with a spacing between the nozzle rows in the array direction is equal to an integral multiple of the nozzle pitch.   
   
   
       13 . The apparatus for manufacturing an electro-optical device according to  claim 8 , further comprising
 a nozzle row spacing adjustment section configured and arranged to adjust a spacing between a plurality of the nozzle rows in the array direction.