Door for vacuum chamber

Abstract

A door for a vacuum chamber is disclosed. The present invention is constructed to prevent the door, for opening or closing an opening which is provided in one surface of a chamber, from being deformed by a bending load generated when a vacuum is created in the chamber, thus enabling a vacuum to be reliably created in the chamber, and reducing the cost of maintenance of the door. The door includes a chamber having in one surface thereof an opening. A door is rotated to open or close the opening of the chamber. A guide plate is fastened to an outer surface of the door in such a way as to be spaced apart from the door by a predetermined interval, and is rotatably coupled at one end thereof to a hinge assembly.

1 . A door for a vacuum chamber, comprising:
 a chamber having in one surface thereof an opening;   a door rotated to open or close the opening of the chamber; and   a guide plate fastened to an outer surface of the door in such a way as to be spaced apart from the door by a predetermined interval, the guide plate being rotatably coupled at one end thereof to a hinge assembly.   
   
   
       2 . The door according to  claim 1 , wherein the door comprises fastening holes having a predetermined depth at regular intervals, and the guide plate comprises through holes corresponding to the fastening holes, so that a fastening member passes through a corresponding through hole and is secured at an end thereof to the corresponding fastening hole, thus fastening the guide plate to the door. 
   
   
       3 . The door according to  claim 1 , wherein first grooves are formed at regular intervals in a surface of the door contacting the guide plate, and second grooves are formed in the guide plate to correspond to the first grooves in the door, so that, when the guide plate contacts the door, a space having a predetermined size is defined between the first and second grooves. 
   
   
       4 . The door according to  claim 2 , wherein each of the first grooves in the door is formed around a corresponding fastening hole to have a predetermined depth, and each of the second grooves in the guide plate is formed around a corresponding through hole to have a predetermined depth. 
   
   
       5 . The door according to  claim 3 , wherein an elastic member is installed in the space, is secured at a first end thereof to an inner surface of each of the first grooves in the door, and is secured at a second end thereof to an inner surface of each of the second grooves in the guide plate. 
   
   
       6 . The door according to  claim 5 , wherein the elastic member comprises a coil spring. 
   
   
       7 . The door according to  claim 2 , further comprising:
 a guide hushing having a hole through which the fastening member passes, and comprising:   a first part passing through a corresponding through hole in the guide plate, and sliding a predetermined interval in the space; and   a second part having a diameter larger than the through hole in the guide plate, and stopped by an outer surface of the guide plate.   
   
   
       8 . The door according to  claim 7 , wherein, when the end of the fastening member is completely fastened to each of the first grooves in the door, a predetermined gap is defined between the second part of the guide bushing and the outer surface of the guide plate. 
   
   
       9 . The door according to  claim 7 , wherein a block is fastened to the guide plate, increases strength of the guide plate, and has a hole for guiding the guide bushing. 
   
   
       10 . The door according to  claim 1 , wherein a base plate, having in a central portion thereof an opening, is provided on a front of the opening of the chamber, and the door is rotated to open or close the opening of the base plate and the opening of the chamber. 
   
   
       11 . The door according to  claim 10 , wherein the hinge assembly is mounted to an end of the base plate, and an end of the guide plate is rotatably coupled to the hinge assembly. 
   
   
       12 . The door according to  claim 3 , wherein each of the first grooves in the door is formed around a corresponding fastening hole to have a predetermined depth, and each of the second grooves in the guide plate is formed around a corresponding through hole to have a predetermined depth.