Shutter disk for physical vapor deposition chamber

Abstract

A shutter disk suitable for shield a substrate support in a physical vapor deposition chamber is provided. In one embodiment, the shutter disk includes a disk-shaped body having an outer diameter disposed between a top surface and a bottom surface. The disk-shape body includes a double step connecting the bottom surface to the outer diameter.

1 . A shutter disk comprising:
 a disk-shaped body, the body comprising:
 a top surface; 
 a bottom surface; 
 an outer diameter disposed between the top surface and the bottom surface; and 
 a double step connecting the bottom surface to the outer diameter. 
   
   
   
       2 . The shutter disk of  claim 1 , wherein the double step further comprises:
 an outer step and an inner step, the outer step extending further into the body than the inner step.   
   
   
       3 . The shutter disk of  claim 2 , wherein the body further comprises:
 an outer wall connecting the outer step to the inner step, the outer wall substantially parallel to a centerline of the body.   
   
   
       4 . The shutter disk of  claim 3 , wherein the inner step and the outer step are substantially perpendicular to the centerline of the body. 
   
   
       5 . The shutter disk of  claim 1 , wherein the body further comprises:
 an annular groove formed in the bottom surface disposed radially inward of the double step.   
   
   
       6 . The shutter disk of  claim 5 , wherein the double step further comprises:
 an outer step and an inner step, the outer step extending further into the body than the inner step but less than the annular groove.   
   
   
       7 . The shutter disk of  claim 1 , wherein the body further comprises:
 a blind hole formed in the bottom surface of the body, a centerline of the blind hole co-linear with a centerline of the body.   
   
   
       8 . The shutter disk of  claim 1 , wherein the body is fabricated from at least one of aluminum, an aluminum alloy, an aluminum silicon alloy, a metal composite, and aluminum silicon (AlSi). 
   
   
       9 . The shutter disk of  claim 1 , wherein the top surface of the body is coated with an aluminum coating. 
   
   
       10 . The shutter disk of  claim 1 , wherein the top surface of the body is coated with a twin-arc-spray aluminum coating. 
   
   
       11 . The shutter disk of  claim 9 , wherein the top surface is textured. 
   
   
       12 . The shutter disk of  claim 11 , wherein the top surface has a roughness average of up to between about 600 to about 800 R a . 
   
   
       13 . The shutter disk of  claim 1 , wherein the body further comprises:
 a sloped surface coupling the outer diameter to the top surface.   
   
   
       14 . The shutter disk of  claim 13 , wherein the body further comprises:
 a blind hole formed in the bottom surface of the body, a centerline of the blind hole co-linear with a centerline of the body.   
   
   
       15 . The shutter disk of  claim 13 , wherein the double step further comprises:
 an outer step and an inner step, the inner step extending further into the body than the outer step.   
   
   
       16 . A shutter disk comprising:
 a disk-shaped body, the body comprising:
 a top surface; 
 a bottom surface; 
 an outer diameter disposed between the top surface and the bottom surface; 
 an outer step formed on the bottom surface; 
 an inner step formed on the bottom surface inward of the outer step, the outer step extending further into the body than the inner step; 
 an outer wall connecting the outer step to the inner step, the outer wall substantially parallel to a centerline of the body; and 
 an annular groove formed in the bottom surface disposed radially inward of the inner step. 
   
   
   
       17 . The shutter disk of  claim 16 , wherein the inner step to the outer step are substantially perpendicular to the centerline of the body; and the outer step extends further into the body than the inner step but less than the annular groove. 
   
   
       18 . The shutter disk of  claim 16 , wherein the body further comprises:
 a blind hole formed in the bottom surface of the body, a centerline of the blind hole co-linear with a centerline of the body.   
   
   
       19 . The shutter disk of  claim 16 , wherein the body is fabricated from at least one of aluminum, an aluminum alloy, an aluminum silicon alloy, a metal composite, and aluminum silicon (AlSi). 
   
   
       20 . The shutter disk of  claim 19 , wherein the top surface is has a roughness average of up to between about 600 to about 800 R a  and is coated with a twin-arc-spray aluminum coating.