MEMS-based sensor for lubricant analysis

Abstract

A fluid contamination analyzer employs one or more MEMS-based sensors. The sensors are incorporated into probes or alternatively may be employed in an in-line analyzer residing in the fluid. The sensors, which can be selective to detect a distinct contaminant within the fluid, sense an impedance of the fluid, which is a function of its contamination and communicates the impedance to analysis circuitry.

1 . A fluid contamination analyzer, comprising:
 at least one sensor, wherein the at least one sensor includes:   a substrate;   a plurality of electrodes formed over the substrate; and   a contaminant selective layer disposed adjacent at least one of (i) the electrodes or (ii) the substrate, said layer being selective to attract a predetermined contaminant within the fluid;   wherein when a fluid contacts the sensor an impedance of the fluid may be determined using the electrodes of the sensor, thereby providing an indication of fluid contamination.