Method for reacting self-igniting dusts in a vacuum pump device

Abstract

Into a vacuum pump device arranged for suctional intake of a process gas ( 38 ) possibly comprising reactive particles ( 40 ), oxygen in the form of air or pure oxygen is supplied in a controlled manner via an oxygen intake ( 26, 26 a, 26 b ). Thus, controlled oxidation takes place in the compression chamber ( 24 ) such that the dust cannot self-ignite in case of sudden ventilation.

1 . A method for exhaustive reaction of self-igniting dust in a dry-sealed vacuum pump device, comprising:
 during operation of the vacuum pump device, continuously supplying oxygen thereto in a dosed manner, whereby an oxidation of the dust is effected.   
   
   
       2 . The method according to  claim 1 , wherein said supplying of oxygen takes place at at least one of an entrance of the vacuum pump device and in the feed lines of the vacuum pump device. 
   
   
       3 . The method according to  claim 1 , wherein said supplying of oxygen takes place along a compression chamber of the vacuum pump device. 
   
   
       4 . The method according to  claim 1 , wherein said supplying of oxygen takes place along or between at least two compression chambers. 
   
   
       5 . The method according to  claim 1 , wherein the supplying of oxygen is performed at an exit or in exhaust lines of the vacuum pump device. 
   
   
       6 . The method according to  claim 1 , wherein the supplying of oxygen is performed via a settable or controllable throttle valve. 
   
   
       7 . The method according to  claim 1 , further including:
 terminating supplying a process gas for condensation, and continuing the supplying of an oxygen-containing gas mixture, for cleaning the pump device and the supply lines from dust and for exhaustive reaction of the dust.   
   
   
       8 . A dry-sealed vacuum pump device comprising:
 at least one driven compression member; and   a housing with a pump entrance and a pump exit, one of said housing or a line connected thereto comprises at least one gas and respectively oxygen intake provided with a throttle valve for regulating an entrance cross-section.   
   
   
       9 . The vacuum pump device of  claim 8 , further including:
 at least one of temperature sensors and pressure sensors in a chamber in which dust is oxidized to monitor a dust oxidation reaction.   
   
   
       10 . A method of reacting exhaust dust in a dry-sealed vacuum device, comprising:
 with a dry-sealed vacuum device, sucking in a process gas with flammable dust;   introducing oxygen into the exhaust gas in or adjacent the dry-sealed vacuum device;   compressing the process gas with flammable dust and the oxygen in a compression chamber of the dry-sealed vacuum device;   oxidizing the flammable dust with the introduced oxygen in the dry-sealed vacuum device; and   discharging the process gas and oxidized dust.