Apparatus and method for making carbon nanotube array

Abstract

An apparatus for making an array of carbon nanotubes includes a reaction chamber with a gas inlet and a gas outlet, a quartz boat disposed in the reaction chamber, a substrate with a surface deposited with a film of first catalyst, and a second catalyst disposed in the quartz beside the substrate. The substrate is disposed in the quartz boat.

1 . An apparatus for making an array of carbon nanotubes, comprising:
 a reaction chamber having a gas inlet introducing a carbon source gas and a carrier gas thereinto and a gas outlet;   a substrate having a layer of first catalyst provided thereon, the substrate being disposed in the reaction chamber; and   a second catalyst reacting with the carbon source gas thereby producing a resultant product promoting catalytic activity of the first catalyst, wherein the reaction chamber defines a first carbon source gas route towards the substrate; the second catalyst is disposed on the route.   
   
   
       2 . The apparatus as claimed in  claim 1 , further comprising a boat supporting the substrate. 
   
   
       3 . The apparatus as claimed in  claim 2 , wherein the boat is a quartz boat. 
   
   
       4 . The apparatus as claimed in  claim 2 , wherein the second catalyst is disposed proximate to the substrate. 
   
   
       5 . The apparatus as claimed in  claim 1 , wherein the second catalyst is comprised of iron, nickel, and alumina. 
   
   
       6 . The apparatus as claimed in  claim 1 , wherein the first catalyst is comprised of iron, cobalt, nickel, and any combination alloy thereof 
   
   
       7 . The apparatus as claimed in  claim 1 , wherein the reaction chamber is substantially tubular-shaped. 
   
   
       8 . An apparatus for making an array of carbon nanotubes, comprising:
 a reaction chamber having a gas inlet introducing a carbon source gas and a carrier gas thereinto and a gas outlet;   a substrate having a layer of first catalyst provided thereon, the substrate being disposed in the reaction chamber;   a second catalyst reacting with the carbon source gas thereby producing a resultant product promoting catalytic activity of the first catalyst; and   a tubular boat receiving the substrate and the second catalyst therein, the tubular boat having an open end introducing the carbon source gas thereinto and an opposite closed end blocking and directing the introduced carbon source gas in the boat to flow toward the substrate, wherein the second catalyst is disposed in the boat in a manner to enable the resultant product associated with the second catalyst to forcedly flow toward the substrate.   
   
   
       9 . The apparatus as claimed in  claim 8 , wherein the boat includes a bottom and at least one sidewall extending from the bottom; the second catalyst is disposed on the bottom and between the substrate and the at least one sidewall of the boat. 
   
   
       10 . An apparatus for making an array of carbon nanotubes, comprising:
 a reaction chamber having a gas inlet and a gas outlet;   a hollow container disposed in the reaction chamber and having only one opening oriented to the gas inlet;   a substrate contained in the hollow container, the substrate having a top surface, a bottom surface contacting the hollow container, and a side surface extending from the top surface to the bottom surface;   a first catalyst disposed on the top surface;   a second catalyst contained in the hollow container and distributed along the side surface of the substrate except at parts of the side surface facing the gas inlet.   
   
   
       11 . The apparatus as claimed in  claim 10 , wherein the hollow container comprises a sidewall and a peripheral wall extending from a periphery of the sidewall towards the gas inlet. 
   
   
       12 . The apparatus as claimed in  claim 11 , wherein both the bottom surface and the second catalyst directly contact the peripheral wall of the hollow container. 
   
   
       13 . The apparatus as claimed in  claim 12 , wherein the second catalyst contacts the side surface except at the parts of the side surface facing the gas inlet. 
   
   
       14 . The apparatus as claimed in  claim 13 , wherein the first catalyst is comprised of iron, cobalt, nickel, and any combination alloy thereof. 
   
   
       15 . The apparatus as claimed in  claim 13 , wherein the second catalyst is metallic powder or netting made of pure iron or nickel. 
   
   
       16 . The apparatus as claimed in  claim 11 , wherein the peripheral wall perpendicularly extends from the periphery of the sidewall and defines the only one opening.