Stage unit, exposure apparatus, and exposure method

Abstract

A power usage supply unit that supplies power usage to a stage which moves on a movement surface has a first axis section, first support sections, a second axis section, and a second support section. The first axis section is movably supported by the first support section in a direction of the first axis and around the first axis, and the second axis section is movably supported by the second support section in a direction of the second axis and around the second axis. And, by employing a mechanism in which the power usage supply unit has at least four degrees of freedom, the power usage supply unit does not interfere with the movement of a stage even when the stage moves in the first and second axis directions and in the rotational direction of each axis, therefore, decrease in position controllability of the stage caused by dragging a tube can be completely avoided.

1 . A stage device that has a stage which moves on a movement surface and a power usage supply unit which supplies power usage to the stage wherein
 the power usage supply unit comprises:
 a first axis section that extends in a direction of a first axis within the movement surface; 
 a first support section that movably supports the first axis section in the direction of the first axis and around the first axis; 
 a second axis section that extends in a direction of a second axis intersecting with the first axis; and 
 a second support section that movably supports the second axis section in the direction of the second axis and around the second axis.