Device and method for patterning a surface of a polymer layer

Abstract

The present invention relates to a device for forming topographic features on a surface of a polymer layer comprising: a polymer layer ( 1 ); a substrate ( 2 ) comprising a conductor, a first surface ( 1 a ) of the polymer layer ( 1 ) being provided on the substrate ( 2 ); and at least one electrode ( 3 ) which, when the device is in use, interacts with a second surface ( 1 b ) of the polymer layer ( 1 ), wherein, when in use, the device is operable to apply a first electrical potential (P 1 ) to the at least one electrode ( 3 ) relative to the substrate ( 2 ), thereby to cause a protrusion ( 4 ) to be formed on the second surface ( 1 b ) of the polymer layer ( 1 ).

1 . A device for forming topographic features on a surface of a polymer layer comprising:
 a polymer layer;   a substrate comprising a conductor, a first surface of the polymer layer being provided on the substrate; and   at least one electrode which, when the device is in use, interacts with a second surface of the polymer layer,   wherein, when in use, the device is operable to apply a first electrical potential to the at least one electrode relative to the substrate, thereby to cause a protrusion to be formed on the second surface of the polymer layer.   
     
     
         2 . A device as claimed in  claim 1  wherein the at least one electrode interacts with the second surface of the polymer layer by being in contact therewith. 
     
     
         3 . (canceled) 
     
     
         4 . A device as claimed in  claim 1  wherein the at least one electrode interacts with the second surface of the polymer layer by being out of contact. 
     
     
         5 . A device as claimed in  claim 4  wherein the distance between the at least one electrode and the second surface of the polymer layer is at least 1 nm. 
     
     
         6 . A device as claimed in  claim 1  wherein the device is operable to apply a second electrical potential to the at least one electrode, which interacts with the second surface of the polymer layer in the region where the protrusion has been formed, the second electrical potential having an opposite polarity to the first electrical potential. 
     
     
         7 . A device as claimed  claim 1  wherein the device is operable to apply heat, irradiation or a combination thereof to the polymer layer. 
     
     
         8 . A device as claimed in  claim 7  wherein the polymer layer is heated to a temperature of between 100° C. to 200° C. 
     
     
         9 . A device as claimed in  claim 1  wherein the polymer layer comprises polystyrene-r-benzocyclobutene 30% random copolymer, PS-30%-BCB. 
     
     
         10 . A device as claimed in  claim 1  wherein the at least one electrode has a substantially extended configuration. 
     
     
         11 . A device as claimed in  claim 1  wherein the at least one electrode interacts with the second surface of the polymer layer via a surface having a patterned structure. 
     
     
         12 . A method for forming topographic features on a surface of a polymer layer, a first surface of the polymer layer being provided on a substrate comprising a conductor, the method comprising the steps of:
 interacting at least one electrode with a second surface of the polymer layer; and   applying a first electrical potential to the at least one electrode relative to the substrate, thereby to cause a protrusion to be formed on the second surface of the polymer layer.   
     
     
         13 . A method as claimed in  claim 12  wherein the at least one electrode interacts with the second surface of the polymer layer by being in contact therewith. 
     
     
         14 . A method as claimed in  claim 13  further comprising at least one of the step of scanning the at least one electrode relative to the second surface of the polymer layer and the step of applying a loading force to the at least one electrode once the at least one electrode is brought into contact with the second surface of the polymer layer. 
     
     
         15 . A method as claimed in  claim 12  wherein the at least one electrode interacts with the second surface of the polymer layer by being out of contact. 
     
     
         16 . A method as claimed in  claim 15  wherein the distance between the at least one electrode and the second surface of the polymer layer is at least 1 nm. 
     
     
         17 . A method as claimed in  claim 12  further comprising the step of applying a second electrical potential to the at least one electrode, which interacts with the second surface of the polymer layer in the region where the protrusion has been formed, the second electrical potential having an opposite polarity to the first electrical potential. 
     
     
         18 . A method as claimed in  claim 12  further comprising the step of applying heat, irradiation or a combination thereof to the polymer layer. 
     
     
         19 . A method as claimed in  claim 18  wherein method further comprises heating the polymer layer to a temperature of between 100° C. to 200° C. 
     
     
         20 . (canceled) 
     
     
         21 . A method as claimed in  claim 12  wherein the at least one electrode has a substantially extended configuration. 
     
     
         22 . A method as claimed in  claim 12  wherein the at least one electrode interacts with the second surface of the polymer layer via a surface having a patterned structure. 
     
     
         23 . (canceled)