Substrate fixture pallet and substrate processor

Abstract

A substrate fixture pallet includes a body part configured to receive a substrate to be processed and a lid part attached movably to the body part so as to fix the substrate when closed relative to the body part. The lid part is configured to form a gap between the body part and the lid part when closed relative to the body part so as to allow the suction air of a dust collector for suctioning cutting powder to be generated at a time of processing the substrate to flow through the gap when the substrate fixture pallet is attached to the dust collector.

1 . A substrate fixture pallet, comprising:
 a body part configured to receive a substrate to be processed; and   a lid part attached movably to the body part so as to fix the substrate when closed relative to the body part, the lid part being configured to form a gap between the body part and the lid part when closed relative to the body part so as to allow a suction air of a dust collector for suctioning a cutting powder to be generated at a time of processing the substrate to flow through the gap when the substrate fixture pallet is attached to the dust collector.   
   
   
       2 . The substrate fixture pallet as claimed in  claim 1 , wherein the body part includes an air passage provided on a surface thereof on a side opposite to the gap. 
   
   
       3 . The substrate fixture pallet as claimed in  claim 2 , wherein the body part further includes a communication path connecting the gap and the air passage. 
   
   
       4 . A substrate processor, comprising:
 a processor body configured to process a substrate using a processing tool;   an attachment table to which a substrate fixture pallet having the substrate fixed thereto is to be attached;   a dust collector configured to suction a cutting powder to be generated at a time of processing the substrate; and   a spacer provided on the attachment table, the spacer being configured to form a gap between the attachment table and the substrate fixture pallet when the substrate fixture pallet is attached to the attachment table, the gap serving as an air passage through which a suction air of the dust collector flows to suction the cutting powder.   
   
   
       5 . The substrate processor as claimed in  claim 4 , further comprising:
 the substrate fixture pallet,   the substrate fixture pallet including:
 a body part configured to receive the substrate; and 
 a lid part attached movably to the body part so as to fix the substrate when closed relative to the body part, the lid part being configured to form an additional gap between the body part and the lid part when closed relative to the body part so as to allow the suction air of the dust collector to flow through the additional gap. 
   
   
   
       6 . The substrate processor as claimed in  claim 4 , wherein the attachment table is configured to allow the substrate fixture pallet to be attached thereto and detached therefrom. 
   
   
       7 . The substrate processor as claimed in  claim 4 , wherein the processing tool is a router bit.