Coating and ion beam mixing apparatus and method to enhance the corrosion resistance of the materials at the elevated temperature using the same

Abstract

The present invention relates, in general, to shoes for measuring the quantity of motion and a method of measuring the quantity of motion using the shoes and, more particularly, to artificial intelligence shoes, in which various numerical values (calorie consumption, body fat, and a pulse), measured by a walking sensor ( 23 ), a body fat measurement unit, and a pulse sensor ( 21 ) mounted in a shoe body, are displayed in real time on a display unit ( 32 ), so that a user can periodically check his or her quantity of motion, and in which calorie consumption and body fat are calculated on the basis of the user's body conditions, so that the precision thereof is high, and such quantity of motion numerical values can be transmitted to various types of external devices, thus enabling the user to periodically manage the quantity of motion thereof.

1 . A coating and ion beam mixing apparatus comprising an electron gun  1  disposed in a reaction chamber  10  in a vacuum, a coating material container  3  located adjacent to the electron gun in the reaction chamber  10  and irradiated with an electron beam generated from the electron gun  1 , a base material  5  secured in an upper portion of the reaction chamber  10 , one surface of which is coated with a coating material  4  melted and vaporized in the coating material container  3 , a jig  8  mounted on another surface of the base material and configured to rotate the base material  5  for uniform deposition of the coating material  4 , and an ion beam irradiation device  20  mounted on a side wall of the reaction chamber  10  and configured to mix the coating material  4  with the base material  5  at an interface therebetween to improve adhesiveness and compactness of a coating layer. 
   
   
       2 . The apparatus according to  claim 1 , wherein the coating material is a ceramic material having a high thermal expansion coefficient and excellent corrosion resistance. 
   
   
       3 . The apparatus according to  claim 2 , wherein the coating material is at least one of the coating materials selected from the group consisting of SiC, SiO 2 , Al 2 O 3  and TiO 2 . 
   
   
       4 . The apparatus according to  claim 1 , wherein the coating process is performed using a physical vapor deposition method including a sputtering method or an evaporation method. 
   
   
       5 . The apparatus according to  claim 1 , wherein the base material is a metallic material having excellent mechanical properties at a temperature ranging from 300 to 900° C. 
   
   
       6 . The apparatus according to  claim 5 , wherein the base material is at least one selected from the group consisting of Alloy 800H, Alloy 690, Hastelloy X, Hayness 230, Hayness 556, CX 2002U composite, Alloy X750, Alloy 718, Sanicro 28 and stainless steel. 
   
   
       7 . The apparatus according to  claim 1 , wherein, the jig is configured such that, after a surface of base material is completely coated, the coated surface of base material is rotated to face an ion beam irradiation inlet in order to expose the coated surface of base material to an ion beam radiated from an ion beam irradiation device. 
   
   
       8 . The apparatus according to  claim 1 , wherein the ion beam irradiation device  20  comprises:
 an ion source  21  for generating an ion;   an ion accelerator  22  for accelerating an ion discharged from the ion source;   an acceleration tube  23  for enlarging an irradiation area of the ion beam; and   a gate valve  24  mounted between the reaction chamber  10  and the ion beam irradiation device  20  to prevent the ion source from being coated with the coating material.   
   
   
       9 . The apparatus according to  claim 1 , wherein an element used for the ion beam irradiation depends on a composition of the base material and a composition of the coating material. 
   
   
       10 . (canceled) 
   
   
       11 . The apparatus according to  claim 9 , wherein, the element used for the ion beam is an element to form compound with elements constituting the coating and the base materials. 
   
   
       12 . The apparatus according to  claim 1 , wherein an element used for the ion beam is one selected from the group consisting of carbon, nitrogen, oxygen, silicon, aluminum, helium, neon, argon titanium, or the mixture thereof. 
   
   
       13 . The apparatus according to  claim 1 , wherein the processes of coating and ion beam irradiation are performed one time or several times in accordance with characteristics of the coating material and the base material. 
   
   
       14 . The apparatus according to  claim 13 , wherein, in the processes of coating and ion beam irradiation, as a difference in thermal properties between the coating material and the base material increases, the coating is performed more multiple times. 
   
   
       15 . The apparatus according to  claim 14 , wherein, in the case where the coating is performed several times, the ion beam irradiation is performed between the coating processes. 
   
   
       16 . The apparatus according to  claim 1 , wherein an energy value and an injection amount of the ion beam radiated from the ion beam irradiation device are adjusted depending on a thickness of each coating layer applied one time or several times. 
   
   
       17 . The apparatus according to  claim 16 , wherein the energy value of the ion beam ranges from 50 to 500 keV, and the injection amount of the ion beam ranges from 1×10 17  to 1×10 18  ions/cm 2 . 
   
   
       18 . The apparatus according to  claim 16 , wherein a thickness of each of the coating layers ranges from 20 to 200 nm. 
   
   
       19 . A method of improving adhesiveness and compactness at an interface between a base material and a coating layer using the coating and ion beam mixing apparatus according to  claim 1 , comprising:
 melting and vaporizing a coating material by radiating an electron beam into a coating material container (step  1 );   applying the coating material melted and vaporized in step  1  on a base material (step  2 ); and   radiating an ion beam to mix the coating material with the base material coated in step  2  at an interface therebetween (step  3 ).