Carbon nanotube emitter and its fabrication method and field emission device (FED) using the carbon nanotube emitter and its fabrication method

Abstract

A carbon nanotube emitter and its fabrication method, a Field Emission Device (FED) using the carbon nanotube emitter and its fabrication method include a carbon nanotube emitter having a plurality of first carbon nanotubes arranged on a substrate and in parallel with the substrate, and a plurality of the second carbon nanotubes arranged on a surface of the first carbon nanotubes.

1 . A carbon nanotube emitter, comprising:
 a plurality of first carbon nanotubes arranged on a substrate, the plurality of first carbon nanotubes being in parallel with the substrate; and   a plurality of the second carbon nanotubes arranged on a surface of the first carbon nanotubes.   
     
     
         2 . The emitter of  claim 1 , wherein a plurality of nano catalyst particles are arranged on the surface of the first carbon nanotubes. 
     
     
         3 . The emitter of  claim 2 , wherein the second carbon nanotubes are grown and formed from the nano catalyst particles. 
     
     
         4 . The emitter of  claim 2 , wherein the nano catalyst particles comprise either a nickel (Ni) or an Invar alloy. 
     
     
         5 . The emitter of  claim 1 , wherein the first carbon nanotubes have a diameter in a range of 30 to 100 nm. 
     
     
         6 . The emitter of  claim 1 , wherein the second carbon nanotubes have a diameter in a range of 1 to 10 nm. 
     
     
         7 - 15 . (canceled) 
     
     
         16 . A Field Emission Device (FED), comprising:
 a substrate;   a cathode electrode arranged on the substrate;   an insulating layer arranged over the substrate to cover the cathode electrode and having an emitter hole adapted to expose a part of the cathode electrode;   a gate electrode arranged on the insulating layer; and   a carbon nanotube emitter arranged on the cathode electrode exposed via the emitter hole, wherein the carbon nanotube emitter includes a plurality of first carbon nanotubes arranged on the cathode electrode and in parallel with the cathode electrode, and a plurality of second carbon nanotubes arranged on a surface of the first carbon nanotubes.   
     
     
         17 . The FED of  claim 16 , further comprising a plurality of nano catalyst particles arranged on the surface of the first carbon nanotubes. 
     
     
         18 . The FED of  claim 17 , wherein the second carbon nanotubes are grown and formed from the nano catalyst particles. 
     
     
         19 . The FED of  claim 17 , wherein the nano catalyst particles comprise either a nickel (Ni) or an Invar alloy. 
     
     
         20 . The FED of  claim 16 , wherein the first carbon nanotubes have a diameter in a range of 30 to 100 nm. 
     
     
         21 . The FED of  claim 16 , wherein the second carbon nanotubes have a diameter in a range of 1 to 10 nm. 
     
     
         22 - 31 . (canceled) 
     
     
         32 . A display device, comprising:
 lower and upper substrates arranged to be spaced apart from each other;   a cathode electrode arranged on the lower substrate;   an insulating layer arranged over the lower substrate to cover the cathode electrode, the insulating layer having an emitter hole adapted to expose a part of the cathode electrode;   a gate electrode arranged on the insulating layer;   a carbon nanotube emitter arranged on the cathode electrode exposed via the emitter hole, the carbon nanotube emitter including a plurality of first carbon nanotubes arranged on the cathode electrode and in parallel with the cathode electrode, and a plurality of second carbon nanotubes arranged on a surface of the first carbon nanotubes;   an anode electrode arranged on a bottom surface of the upper substrate; and   a phosphor layer arranged on a bottom surface of the anode electrode.   
     
     
         33 . The device of  claim 32 , wherein a plurality of nano catalyst particles are arranged on the surface of the first carbon nanotubes. 
     
     
         34 . The device of  claim 33 , wherein the second carbon nanotubes are grown and formed from the nano catalyst particles. 
     
     
         35 . A carbon nanotube emitter made according to the method of claim  7 , comprised of:
 said plurality of first carbon nanotubes being arranged on said second substrate with the plurality of first carbon nanotubes being parallel to the second substrate; and   said plurality of the second carbon nanotubes being arranged on a surface of the first carbon nanotubes.   
     
     
         36 . A field emission device made by the method of claim  7 , comprised of:
 a cathode electrode arranged on the second substrate;   an insulating layer arranged over the second substrate to cover the cathode electrode, said insulating layer having an emitter hole disposed to expose a part of the cathode electrode;   a gate electrode arranged on the insulating layer; and   a carbon nanotube emitter arranged on the cathode electrode exposed via the emitter hole, wherein the carbon nanotube emitter comprises said plurality of first carbon nanotubes arranged on the cathode electrode in parallel with the cathode electrode, and said plurality of second carbon nanotubes arranged on a surface of the first carbon nanotubes.   
     
     
         37 . A display device made by the method of claim  7 , comprised of:
 an upper substrate spaced apart from said second substrate;   a cathode electrode arranged on the second substrate;   an insulating layer arranged over the second substrate to cover the cathode electrode, the insulating layer having an emitter hole disposed to expose a part of the cathode electrode;   a gate electrode arranged on the insulating layer;   a carbon nanotube emitter arranged on the cathode electrode exposed via the emitter hole, the carbon nanotube emitter including said plurality of first carbon nanotubes arranged on the cathode electrode in parallel with the cathode electrode, and said plurality of second carbon nanotubes arranged on a surface of the first carbon nanotubes;   an anode electrode arranged on a major surface of the upper substrate facing said carbon nanotube emitter; and   a phosphor layer arranged on a bottom surface of the anode electrode.