Thin plate storage transport system and reticle case using the same

Abstract

A thin plate storage transport system including a pressure container for containing a thin plate provided with a container main body for containing one or a plurality of thin plates, a lid body attached by covering the container main body, and a seal for airtightly isolating a containing space formed inside from an outside environment when the container main body is closed and covered by the lid body; and a pressure supply device for setting a pressure inside the containing space at a set pressure higher than an outside pressure by supplying a pressure into the containing space of the pressure container for containing a thin plate. As a result, the inside of the containing space can be kept at high cleanliness for a long time.

1 . A thin plate storage transport system, comprising:
 a pressure container for containing a thin plate including a container main body for containing one or a plurality of thin plates, a lid body attached by covering said container main body, and a seal for airtightly isolating a containing space formed inside from an outside environment when the container main body is closed and covered by the lid body; and   a pressure supply device, provided in the pressure container for containing a thin plate, for setting a pressure in the containing space at a set pressure higher than an outside pressure by supplying a pressure into said containing space.   
     
     
         2 . The thin plate storage transport system according to  claim 1 , wherein
 said pressure supply device comprises a pressure cylinder and is incorporated in said pressure container for containing a thin plate.   
     
     
         3 . The thin plate storage transport system according to  claim 1 , further comprising:
 a rack for pressure container for storing said pressure container for containing a thin plate; and   a connection fitting that connects the pressure container for containing a thin plate and said pressure supply device provided on said rack for pressure container side by attaching said pressure container for containing a thin plate to the rack for pressure container.   
     
     
         4 . The thin plate storage transport system according to  claim 1 , further comprising:
 a ventilation hole provided at one or both of said container main body or the lid body for communicating the inside of said containing space and the outside; and   a check valve provided at the ventilation hole for allowing a flow of gas into said containing space from outside and for preventing a flow opposite thereto at the same time.   
     
     
         5 . The thin plate storage transport system according to  claim 1 , wherein
 said pressure supply device is attached into said pressure container for containing a thin plate.   
     
     
         6 . The thin plate storage transport system according to  claim 4 , wherein
 said check valve is provided with a mechanism that can be opened by an operation from outside.   
     
     
         7 . The thin plate storage transport system according to  claim 6 , wherein
 said ventilation hole is provided in two pieces or more, and at least two of the plurality of ventilation holes are provided at a gas introduction interface and a gas leading-out interface provided at said pressure supply device capable of connection; and   said pressure supply device is connectably provided with an opening and closing mechanism for opening and closing control of the check valve of said ventilation hole.   
     
     
         8 . The thin plate storage transport system according to  claim 1 , wherein
 the seal has at least one lip and also has at least one protruding portion at a portion facing a seal receiver formed on said container main body or the lid body.   
     
     
         9 . A thin plate storage container, comprising:
 an inner container including a receiving body for containing a thin plate, a lid body attached by covering the receiving body, and a seal for airtightly isolating a containing space formed inside from an outside environment when said receiving body is covered and closed by the lid body;   an outer container in which the inner container is contained; and   a pressure supply device for setting a pressure inside the containing space at a set pressure higher than a pressure in said outer container by supplying a pressure into said containing space of said inner container.   
     
     
         10 . (canceled) 
     
     
         11 . A reticle case, comprising:
 an inner container including a receiving body for containing a reticle, a lid body attached by covering the receiving body, and a seal for airtightly isolating a containing space formed inside from an outside environment when said receiving body is closed and covered by the lid body;   an outer container in which the inner container is contained; and   a pressure supply device for setting a pressure inside the containing space at a set pressure higher than a pressure in said outer container by supplying a pressure into said containing space of said inner container.   
     
     
         12 . (canceled) 
     
     
         13 . The reticle case according to  claim 11 , wherein
 said outer container has an outer receiving body and an outer lid body and comprises a seal for airtightly isolating the inside of the outer container from an environment when the outer receiving body is closed by said outer lid body;   an inner-container constraining portion for supporting and constraining said inner container;   at least one respiratory valve provided with a membrane filter inside and communicating with the outside environment through the membrane filter; and   an outer connection portion for connecting said outer receiving body and said lid body when said outer receiving body is closed by said lid body.   
     
     
         14 . The reticle case according to  claim 11 , wherein
 said pressure supply device is attached into said outer container.   
     
     
         15 . The reticle case according to  claim 11 , wherein
 said inner container and the outer container is formed by an antistatic polymer material, and a path between the inner container and the outer container are electrically connected.   
     
     
         16 . The reticle case according to  claim 11 , wherein
 said pressure supply device comprises a pressure cylinder and is incorporated in said pressure container for containing a thin plate.   
     
     
         17 . The reticle case according to  claim 11 , further comprising:
 a rack for pressure container for storing said pressure container for containing a thin plate; and   a connection fitting for connecting the pressure container for a thin plate and said pressure supply device provided on said rack for pressure container side by attaching said pressure container for containing a thin plate to the rack for pressure container.   
     
     
         18 . The reticle case according to  claim 11 , further comprising
 a ventilation hole provided one or both of said container main body or the lid body for communicating the inside of said containing space and the outside; and   a check valve provided at the ventilation hole for allowing a flow of a gas into said containing space from outside and for preventing a flow opposite thereto at the same time.   
     
     
         19 . (canceled) 
     
     
         20 . The reticle case according to  claim 18 , wherein
 said check valve is provided with a mechanism that can be opened by an operation from outside.   
     
     
         21 . The reticle case according to  claim 20 , wherein
 said ventilation hole is provided in two pieces or more, and at least two of the plurality of ventilation holes are connectably provided at a gas introduction interface and a gas leading-out interface provided at said pressure supply device; and   said pressure supply device is provided with an opening and closing mechanism for opening and closing control of the check valve of said ventilation hole.   
     
     
         22 . The reticle case according to  claim 11 , wherein
 the seal has at least one lip and also has at least one protruding portion at a portion facing a seal receiver formed on said container main body or the lid body.   
     
     
         23 . (canceled) 
     
     
         24 . (canceled)