Method of manufacturing printed circuit board
Abstract
A method of manufacturing the same, in which a fluorine resin coating layer is formed on a resin substrate, and then a copper layer is formed using a dry process including ion beam surface treatment and vacuum deposition instead of a conventional wet process including surface roughening and electroless copper plating. The interfacial adhesion of the substrate material may be increased without changing the surface roughness thereof, thus realizing a highly reliable fine circuit. As well, a low dielectric constant and a low loss coefficient may be obtained thanks to the formation of the fluorine resin layer. Further, a wet process is replaced with a dry process, whereby the copper plating layer may be formed in an environmentally friendly manner.
Claims
exact text as granted — not AI-modified1 . A method of manufacturing a printed circuit board, comprising:
providing a resin substrate for the printed circuit board; coating at least one surface of the resin substrate with fluorine resin; forming at least one via hole for interlayer electrical connection in the substrate coated with the fluorine resin; surface treating the substrate having the via hole using ion beams; forming a copper seed layer on the surface treated substrate using a vacuum deposition process; plating the substrate having the copper seed layer with a copper pattern to thus form a copper pattern plating layer; and removing part of the copper seed layer on which the copper pattern plating layer is not formed.
2 . The method as set forth in claim 1 , wherein the fluorine resin is selected from the group consisting of polytetrafluoroethylene, fluorinated ethylene propylene, perfluoroalkoxy, ethylene-tetrafluoroethylene, polyvinylidene fluoride, ethylene-chlorotrifluoroethylene, polychlorotrifluoroethylene, and combinations thereof.
3 . The method as set forth in claim 1 , wherein the coating with the fluorine resin is performed by applying a liquid fluorine resin on the substrate and then heat treating it at 100˜450° C.
4 . The method as set forth in claim 3 , wherein the applying of the fluorine resin and the heat treating thereof are repeated one to ten times.
5 . The method as set forth in claim 1 , wherein the coating with the fluorine resin is performed in a sheet manner or a roll-to-roll manner.
6 . The method as set forth in claim 1 , wherein the surface treating using the ion beams is performed in the presence of an inert gas selected from the group consisting of Ar, O 2 , N 2 , Xe, CF 4 , H 2 , Ne, Kr, and mixtures thereof.
7 . The method as set forth in claim 1 , wherein the vacuum deposition process is sputtering, thermal evaporation, or e-beam.
8 . The method as set forth in claim 1 , wherein the fluorine resin coating layer has a thickness from 20 nm to 10 μm.
9 . The method as set forth in claim 1 , wherein the copper seed layer has a thickness from 20 nm to 4 μm.
10 . The method as set forth in claim 1 , wherein the resin substrate is a substrate composed of epoxy resin or fluorine resin.Join the waitlist — get patent alerts
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