Diaphragm pump

Abstract

In a diaphragm pump performing electrostatic atomization, occurrence of defects such as electrolysis of liquid is restricted and enables to electrostatic atomization smoothly. The diaphragm pump 10 comprises a pump chamber unit 1 and a diaphragm unit 2 , and the diaphragm unit 2 has a diaphragm driving portion 2 a by a piezoelectric element 21 and a driving power transmission portion 2 b to transmit variation of the driving portion 2 a to a pump chamber portion 3 . The pump chamber unit 1 comprises a pump chamber 31 formed of an electric conductive material, a liquid container 4 , a suction flow path 34 a coupling the liquid container 4 and the pump chamber 31 , a discharge vent 5 from which the liquid is discharged, and a discharge flow path 34 b coupling the discharge vent 5 and the pump chamber 31 , and the pump chamber 31 has a driven membrane 33 a which is cooperated with the driving power transmission portion 2 b and formed of an electric conductive resin. Thereby, flow paths 37 of the liquid can be made the same electric potential, and defects such as isolation of liquid due to internal electric field or generation of gas due to electrolysis can be prevented, and electrostatic atomization can be performed smoothly.

1 . A diaphragm pump for transferring liquid to electrostatically atomize the liquid, comprising a piezoelectric element, a diaphragm which is deformed by the piezoelectric element, and a pump chamber that varies a capacity thereof in conjunction with the diaphragm and performs suction and discharge of the liquid due to variation of the capacity, wherein
 the diaphragm and the pump chamber are detachably attached each other;   the diaphragm comprises a driving power transmission portion to transmit deformation of the piezoelectric element to the pump chamber;   the pump chamber comprises   a driven membrane which is in conjunction with the driving power transmission portion,   a liquid container which is deformed via the driven membrane and supplies liquid to the pump chamber,   a first flow path which couples the liquid container and the pump chamber,   a discharge vent from which the liquid from the liquid container is discharged, and   a second flow path which couples the discharge vent and the pump chamber; and wherein   when the diaphragm and the pump chamber are coupled, at least the liquid container, the first flow path, the pump chamber, the second flow path and the discharge vent are electrically connected to be the same potential.   
   
   
       2 . The diaphragm pump in accordance with  claim 1 , wherein
 a face of the driving power transmission unit which contacts the driven membrane is coated by an electric conductive material, and the driven membrane is formed of a resin material.   
   
   
       3 . The diaphragm pump in accordance with  claim 1 , wherein
 the driven membrane has a lamination film of a resin film and an electric conductive film appressed each other.