Method of forming micropattern, method of manufacturing optical recording medium master copy, optical recording medium master copy, optical recording medium stamper, and optical recording medium

Abstract

By using an existing, relatively inexpensive manufacturing device, micropatterns (e.g. guiding grooves, prepits) having such track pitch and pit pitch that are smaller than the diameter of a light spot are formed more finely. There are provided at least two layers, i.e. (i) a resin substrate and (ii) a depressed part inducing layer made of dielectric material or metal oxide. A light beam is radiated and focused onto the depressed part inducing layer so as to form pit parts and/or guiding grooves on irradiated parts of the resin substrate. The depressed part inducing layer is then removed, so as to expose the pit parts and/or guiding grooves.

1 - 58 . (canceled) 
   
   
       59 . A medium comprising:
 a lamination formed by laminating a resin layer and a depressed part inducing layer made of zinc oxide; and   wherein heat is generated in the depressed part inducing layer by radiating and focusing a light beam modulated by recording signals onto at least the depressed part inducing layer, so as to form a depressed part corresponding to the recording signals in the resin layer corresponding to a site where heat is generated upon the radiation and focusing.   
   
   
       60 . The medium as set forth in  claim 59 , wherein the resin layer is made of polyolefin resin. 
   
   
       61 . The medium as set forth in  claim 59 , wherein the lamination is formed on a substrate from the side of the resin layer. 
   
   
       62 . A medium comprising:
 a lamination formed by laminating a resin layer, a depressed part inducing layer made of zinc oxide and a heat-absorbing layer in this order; and   wherein heat is generated in the depressed part inducing layer by radiating and focusing a light beam modulated by recording signals onto at least the heat-absorbing layer, so as to form a depressed part corresponding to the recording signals in the resin layer corresponding to a site where heat is generated upon the radiation and focusing.   
   
   
       63 . The medium as set forth in of  claim 62 , wherein the light beam is radiated and focused onto the heat-absorbing layer from the side of the resin layer. 
   
   
       64 . The medium as set forth in  claim 62 , wherein:
 a metal layer is formed on the heat-absorbing layer; and   the light beam is radiated and focused onto the heat-absorbing layer from the side of the resin layer.   
   
   
       65 . The medium of  claim 62 , wherein the heat-absorbing layer is made of silicon. 
   
   
       66 . The medium as set forth in  claim 62 , wherein the lamination is formed on a substrate from the side of the resin layer. 
   
   
       67 . A method of recording, comprising the steps of:
 forming a lamination by laminating at least a resin layer without photosensitivity and a depressed part inducing layer made of zinc oxide;   radiating and focusing a light beam modulated by recording signals onto at least the depressed part inducing layer of the lamination to generate heat in the depressed part inducing layer; and   forming a depressed part corresponding to the recording signals in the resin layer corresponding to a site where heat is generated upon the radiating and focusing, to perform recording.   
   
   
       68 . A method of recording, comprising the steps of:
 forming a lamination by laminating at least a resin layer without photosensitivity, a depressed part inducing layer made of zinc oxide, and a heat-absorbing layer in this order;   radiating and focusing a light beam onto at least the heat-absorbing layer of the lamination to generate heat in the depressed part inducing layer corresponding to an irradiated area; and   forming a depressed part corresponding to recording signals in the resin layer corresponding to a site where heat is generated upon the radiation and focusing, to perform recording.