Cryopump louver extension

Abstract

A standard size cryopump adapted to be mounted behind a nonstandard gate valve by extending the inlet array to a larger diameter. A standard size cryopump adapted to be mounted behind a nonstandard gate valve by using an extension attached to flanges, where the flanges correspond to the diameter of the nonstandard gate valve.

1 . A cryopump comprising:
 a refrigerator having first and second stages;   a cold cryopanel;   a warm cryopanel;   an inlet array having an extended support bracket that extends outside of said warm cryopanel; and   a housing, wherein said inlet array fits inside said housing.   
   
   
       2 . The cryopump as claimed in  claim 1 , further comprising one or more outer louvers on said extended support bracket, wherein the one or more outer louvers are on a portion of said extended support bracket that extends outside of said warm cryopanel. 
   
   
       3 . The cryopump as claimed in  claim 1 , wherein the warm cryopanel is designed to closely fit a smaller housing having a first inner diameter, and wherein said housing has a second diameter that is larger than said first inner diameter. 
   
   
       4 . The cryopump as claimed in  claim 1 , wherein the cyropump is mounted behind a gate valve having an inner diameter that matches said housing. 
   
   
       5 . The cryopump as claimed in  claim 1 , further comprising a flange that attaches said housing to a gate valve. 
   
   
       6 . The cryopump as claimed in  claim 5 , wherein the cyropump is mounted behind a gate valve having an inner diameter that matches said flange. 
   
   
       7 . The cryopump as claimed in  claim 1 , further comprising one or more inner louvers on said inlet array. 
   
   
       8 . A cryopump comprising:
 a refrigerator having first and second stages;   a cold cryopanel;   a warm cryopanel;   a housing having a close fit around said warm panel and having an first inner diameter;   an inlet array that fits inside said housing;   a flange that attaches said housing to a gate valve having a second inner diameter; and   a bracket extension attached to said inlet array and extends said inlet array above said flange; wherein said second inner diameter is larger than said first inner diameter.   
   
   
       9 . The cryopump as claimed in  claim 8 , wherein said inlet array extends less than 3 cm above said flange. 
   
   
       10 . The cryopump as claimed in  claim 8 , wherein said flange is up to 30% larger than a comparable flange of said housing that attaches to a comparable gate valve having an inner diameter than is similar to said first inner diameter. 
   
   
       11 . The cryopump as claimed in  claim 8 , wherein said bracket extension extends outside of said housing. 
   
   
       12 . The cryopump as claimed in  claim 8 , wherein the cyropump is mounted behind a gate valve. 
   
   
       13 . The cryopump as claimed in  claim 8 , further comprising one or more inner louvers on said inlet array.