Wafer storage carrier

Abstract

It is an object of the invention to provide a wafer storage carrier that makes it possible to prevent wafers from being damaged or broken, regardless of the state of wafer warpage. A top plate and two side wall plates secured to left and right edges of the top plate describe two rectangular open-ended sides. One of these rectangular open-ended sides is closed off by a rear wall plate. At least two support rods constituting a wafer support shelf are affixed to a central portion of the rear wall plate with respect to the transverse direction, extending toward the other rectangular open-ended side.

1 . A wafer storage carrier comprising:
 a flat top plate;   side wall plates secured to left and right ends of said top plate so as to face one another;   a rear wall plate for closing off one of two rectangular open-ended sides formed by said top plate and said side wall plate; and   a wafer support shelf having at least two support rods that are embeddedly affixed in a central portion of the said rear wall plate along a transverse direction and that extend towards another one of said rectangular open-ended sides.   
   
   
       2 . The wafer storage carrier of  claim 1 , wherein a wafer support surface of said wafer support shelf is parallel to said top plate. 
   
   
       3 . The wafer storage carrier of  claim 1 , wherein a plurality of wafer support shelves are present. 
   
   
       4 . The wafer storage carrier of  claim 1 , wherein the support rods are made of metal and are clad in a Teflon® tube. 
   
   
       5 . The wafer storage carrier of  claim 3 , wherein said support rods are circular in cross-section. 
   
   
       6 . The wafer storage carrier of  claim 1 , wherein said side wall plate and said rear wall plate are capable of being detached from said top plate.