US2009283745A1PendingUtilityA1

Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles

Assignee: NANTERO INCPriority: Jul 25, 2001Filed: Jul 28, 2009Published: Nov 19, 2009
Est. expiryJul 25, 2021(expired)· nominal 20-yr term from priority
H10W 20/0554H10W 20/031C01B 32/162B82Y 30/00C01B 2202/22C01B 2202/02G11C 23/00G11C 13/025B82Y 10/00B82Y 40/00G11C 2213/16Y10S977/843G11C 2213/81
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Claims

Abstract

Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles are disclosed. Carbon nanotube growth catalyst is applied on to a surface of a substrate. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst on to a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric is substantially uniform density.

Claims

exact text as granted — not AI-modified
1 . A nanotube article manufactured by the following steps:
 applying carbon nanotube growth catalyst on to a surface of a substrate;   subjecting the substrate to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes, wherein the nanotubes of the fabric are substantially parallel to said surface of the substrate;   selectively removing portions of the non-woven fabric according to a defined pattern; and   providing first and second electrodes in contact with respective first and second portions of the patterned non-woven fabric;   wherein the patterned non-woven fabric forms a conductive trace between the first and second electrodes to create the nanotube article.   
     
     
         2 . The nanotube article of  claim 1  wherein the carbon nanotube growth catalyst applied to a surface of a substrate includes metallic nanoparticles. 
     
     
         3 . The nanotube article of  claim 1  wherein the carbon nanotube growth catalyst applied to a surface of a substrate includes metal oxide nanoparticles. 
     
     
         4 . The nanotube article of  claim 1  further manufactured by a step of derivitizing the surface of the substrate. 
     
     
         5 . The nanotube article of  claim 4  wherein the step of derivitizing the surface of the substrate includes creating a more hydrophobic environment to promote adhesion of the carbon nanotube growth catalyst. 
     
     
         6 . The nanotube article of  claim 4  wherein the step of derivitizing the surface of the substrate includes creating a more hydrophilic environment to promote adhesion of the carbon nanotube growth catalyst. 
     
     
         7 . The nanotube article of  claim 1  wherein the step of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying a ferritin solution. 
     
     
         8 . The nanotube article of  claim 1  wherein the carbon nanotube growth catalyst creates a substantial monolayer of nanoparticles on the surface of the substrate. 
     
     
         9 . The nanotube article of  claim 1  wherein the step of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying a metal ligand-catalyst precursor. 
     
     
         10 . The nanotube article of  claim 9  wherein the surface is functionalized to promote binding of the ligand. 
     
     
         11 . The nanotube article of  claim 9  wherein the metal ligand-catalyst precursor has a formula ML, in which M is metal from a group including iron, cobalt, or nickel, and in which L is at least one organic ligand. 
     
     
         12 . The nanotube article of  claim 9  wherein the metal ligand-catalyst precursor is applied by a spin coating technique. 
     
     
         13 . The nanotube article of  claim 9  in which the metal ligand-catalyst precursor is oxidized to remove an organic shell therefrom. 
     
     
         14 . The nanotube article of  claim 1  wherein the step of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying a solution of iron oxide nanoparticles on the surface of the substrate. 
     
     
         15 . The nanotube article of  claim 14  wherein a spin coating technique is used to apply the solution of iron oxide. 
     
     
         16 . The nanotube article of  claim 15  wherein the spin coating technique includes repetitive applications of the solution of iron oxide nanoparticles and repetitive distributing thereof by spinning the substrate at a defined rate. 
     
     
         17 . The nanotube article of  claim 1  wherein the step of applying carbon nanotube growth catalyst on to a surface of a substrate includes applying a suspension of liquid metal catalyst precursor on the surface of the substrate. 
     
     
         18 . The nanotube article of  claim 1  wherein the carbon-containing gas comprises methane. 
     
     
         19 . The nanotube article of  claim 1  wherein the carbon-containing gas comprises ethylene. 
     
     
         20 . The nanotube article of  claim 18  wherein chemical vapor deposition is at about 850° C. for about ten minutes and the methane is applied at about a 500 sccm flow. 
     
     
         21 . The nanotube article of  claim 19  wherein chemical vapor deposition is at about 800° C. for about forty minutes and the ethylene is applied at about a 10 sccm flow. 
     
     
         22 . The nanotube article of  claim 1  wherein the step of subjecting the substrate to chemical vapor deposition includes subjecting the substrate to inert gasses. 
     
     
         23 . The nanotube article of  claim 22  wherein the inert gasses comprise a controlled flow of Argon and Hydrogen. 
     
     
         24 . The nanotube article of  claim 23  wherein the controlled flow of Argon and Hydrogen comprises a flow ratio of 1:4. 
     
     
         25 . The nanotube article of  claim 1  further manufactured by a step of oxidizing the substrate prior to chemical vapor deposition. 
     
     
         26 . The nanotube article of  claim 1  wherein the nanotube growth catalysts comprise nanoparticles having selected diameters. 
     
     
         27 . The nanotube article of  claim 1  wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the relative composition of metallic and semiconducting nanotubes in the fabric is controlled. 
     
     
         28 . The nanotube article of  claim 1  wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the manufacturing steps further includes selectively removing metallic nanotubes. 
     
     
         29 . The nanotube article of  claim 1  wherein the carbon nanotubes of the non-woven fabric include metallic nanotubes and semiconducting nanotubes and wherein the manufacturing steps further includes selectively removing semiconducting nanotubes.

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