Method of manufacturing an optical member having stacked high and low refractive index layers

Abstract

A method of making an optical member including high refractive index layers and low refractive index layers, which are each relatively thin as compared with an optical length, and disposed alternately in the lateral direction with respect to an optical axis. Each width of the high refractive index layers and the low refractive index layers is equal to or smaller than the wavelength order of incident light.

1 . A manufacturing method of an optical member comprising the steps of:
 forming the films of any one of high refractive index layers having a great refractive index and low refractive index layers having a low refractive index;   forming a plurality of opening portions by arraying in the lateral direction of said films; and   embedding each of said opening portions with the others of said high refractive index layers and said low refractive index layers;   thus manufacturing an optical member where said high refractive index layers and said low refractive index layers are disposed alternately in the lateral direction as to an optical axis.   
   
   
       2 . A manufacturing method of a solid-state imaging device comprising the steps of:
 forming low refractive index layers having a small refractive index on a semiconductor substrate where a light reception portion is formed;   forming high refractive index layers having a great refractive index on said low refractive index layers;   forming a plurality of opening portions at positions corresponding to said light reception portions of said refractive index layers by arraying said plurality of opening portions; and   embedding each of said opening portions with said low refractive index layers;   thus manufacturing an optical member where said high refractive index layers and said low refractive index layers are disposed alternately in the lateral direction as to an optical axis, integral with said semiconductor substrate.