Apparatus and methods for using a polishing tape cassette

Abstract

Methods and apparatus are provided for housing a polishing tape adapted to polish a substrate. The invention includes a cassette comprising a body portion; and a head portion, wherein the head portion includes: a pair of guide walls; one or more supply rollers positioned between the guide walls in the head portion; and wherein the guide walls are adapted to guide a polishing tape housed in the body over the one or more supply rollers. Numerous other aspects are provided.

1 . A cassette for housing a polishing tape adapted to polish a substrate, the cassette comprising:
 a body portion; and   a head portion, wherein the head portion includes:
 a pair of guide walls, and 
 one or more supply rollers positioned between the guide walls in the head portion, 
   wherein the guide walls are adapted to guide a polishing tape housed in the body over the one or more supply rollers.   
   
   
       2 . The cassette of  claim 1  further comprising:
 at least one supply spool positioned within the body portion and adapted to provide a length of polishing tape to the head portion.   
   
   
       3 . The cassette of  claim 2  further comprising:
 at least one take-up spool positioned within the body portion and adapted to receive a length of polishing tape from the head portion.   
   
   
       4 . The cassette of  claim 1  wherein the one or more supply rollers rotate relative to the guide walls. 
   
   
       5 . The cassette of  claim 1  wherein the one or more supply rollers are flangeless. 
   
   
       6 . The cassette of  claim 1  wherein the one or more supply rollers have a constant diameter. 
   
   
       7 . The cassette of  claim 1  wherein the head portion further includes one or more take-up rollers. 
   
   
       8 . The cassette of  claim 1  wherein the guide walls are adapted to align the polishing tape on the one or more supply rollers. 
   
   
       9 . The cassette of  claim 1  wherein a width of the one or more supply spools is substantially the same as a width of the polishing tape. 
   
   
       10 . The cassette of  claim 1  further comprising:
 a selectively removable cassette body cover.   
   
   
       11 . A system for polishing an edge of a substrate comprising:
 a substrate support adapted to support a substrate;   a polishing head adapted to press a polishing tape against an edge of the substrate; and   a cassette for housing the polishing tape, the cassette comprising:
 a body portion; and 
 a head portion, wherein the head portion includes:
 a pair of guide walls; 
 one or more supply rollers positioned between the guide walls in the head portion; and 
 
 wherein the guide walls are adapted to guide the polishing tape housed in the body over the one or more supply rollers. 
   
   
   
       12 . The system of  claim 11  further comprising:
 at least one supply spool positioned within the body portion and adapted to provide a length of polishing tape to the head portion.   
   
   
       13 . The system of  claim 12  further comprising:
 at least one take-up spool positioned within the body portion and adapted to receive a length of polishing tape from the head portion.   
   
   
       14 . The system of  claim 13  wherein at lest one of the supply and take-up spools are indexed to control the amount of polishing tape advanced therefrom. 
   
   
       15 . The system of  claim 13  wherein the polishing tape continuously advances. 
   
   
       16 . The system of  claim 11  wherein the one or more supply rollers rotate relative to the guide walls. 
   
   
       17 . The system of  claim 11  wherein the one or more supply rollers are flangeless. 
   
   
       18 . The system of  claim 11  wherein the one or more supply rollers have a constant diameter. 
   
   
       19 . The system of  claim 11  further comprising one or more spool drivers adapted to rotate the one or more supply and take-up spools. 
   
   
       20 . A method comprising:
 providing a supply spool including a length of polishing tape;   routing the length of polishing tape over a supply roller positioned between two walls in a head portion of a cassette; and   providing a take-up spool adapted to receive the length of polishing tape from the supply roller, wherein the supply spool and take-up spool are housed in a body portion of the cassette.   
   
   
       21 . The method of  claim 20  further comprising:
 disengaging a spent supply spool from a spool driver before providing the supply spool including the length of polishing tape.   
   
   
       22 . The method of  claim 21  further comprising:
 re-purposing the spent supply spool as the take-up spool.   
   
   
       23 . The method of  claim 20  further comprising:
 adhering the length of polishing tape to an end of spent polishing tape.   
   
   
       24 . The method of  claim 23  further comprising:
 advancing the adhered length of polishing tape and spent polishing tape through the head portion of the cassette and to the take-up spool.   
   
   
       25 . The method of  claim 20  further comprising:
 installing the cassette on a polishing system.