US2009260566A1PendingUtilityA1

Mask support, mask assembly, and assembly comprising a mask support and a mask

Assignee: APPLIED MATERIALS INCPriority: Apr 18, 2008Filed: Oct 2, 2008Published: Oct 22, 2009
Est. expiryApr 18, 2028(~1.7 yrs left)· nominal 20-yr term from priority
Y10T29/49863Y10T29/49826B05C 21/005G03F 7/12H05B 33/10C23C 14/04C23C 14/042
45
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Claims

Abstract

A mask support 10 comprises a frame element 20 and an elastic element 30. The elastic element 30 is fixed to the frame element 20. The elastic element 30 is a component integrally formed of a flexible material. It comprises a lever or arm portion 37 having a first engagement protrusion 38 extending in an angle of approximately 90° from the free end of the arm portion 37. A mask assembly 40 comprises a laminar mask 41, e.g. manufactured from a thin metal foil, and connecting elements 42. The connecting elements 42 include an engagement portion 43 for engagement with the engagement protrusion 38 of the elastic element 30. The mask 41 may be attached/stretched to the mask support 10 as well as to detached from the mask support 10 comfortably.

Claims

exact text as granted — not AI-modified
1 . A mask support for supporting a mask, particularly for supporting a laminar mask for use in an OLED coating device, comprising a frame element and a plurality of elastic elements;
 wherein both a first elastic element and a second elastic element of said plurality of elastic elements comprise a first engagement means arranged at said first elastic element and a said second elastic element, respectively, for engagement with a corresponding second engagement means provided at said mask assembly for carrying said mask;   wherein said elastic elements are configured for fixing said mask to said frame element and for stretching said mask supported in said frame element by pushing an edge portion of said mask away from said frame element, and said first elastic element and said second elastic element are arranged adjacent to each other along a substantially straight edge of said frame element.   
     
     
         2 . The mask support of  claim 1 , wherein said elastic elements are configured for detachably attaching said mask to said frame element. 
     
     
         3 . The mask support of  claim 1 , wherein both said first elastic element and said second elastic element comprise a lever or arm portion, and said first engagement means of said first elastic element and said first engagement means of said second elastic element comprise a protrusion extending in an angle from said lever or arm portion. 
     
     
         4 . The mask  claim 1 , wherein both first elastic element and said second elastic element comprise a curved portion arranged between said lever portion and a mounting portion for mounting said first elastic element and said second elastic element, respectively, to said frame element. 
     
     
         5 . The mask support of  claim 4 , wherein said first elastic element and said second elastic element have a different structure. 
     
     
         6 . The mask support of  claim 5 , wherein said curved portion of said first elastic element and said curved portion of said second elastic element comprise a different number of curves. 
     
     
         7 . The mask support of  claim 1 , wherein said first engagement means of said first elastic element and the first engagement means said second elastic element are movable relative to said frame element at least from a first position in which the respective elastic element is in a released state to a second position in which the elastic element is in a compressed state for locking the mask to the frame element and stretching said mask. 
     
     
         8 . The mask support of  claim 1 , wherein said first engagement means of said first elastic element and said first engagement means of said second elastic element are rotatably arranged at said frame element. 
     
     
         9 . The mask support of  claim 1 , wherein both said first elastic element and said second elastic element are integrally formed of a flexible material. 
     
     
         10 . The mask support of  claim 1 , wherein both said first elastic element and said second element are arranged along at least a marginal edge of said frame element. 
     
     
         11 . The mask support of  claim 1 , wherein said first elastic element and said second elastic element are configured to exert different stretching forces to said mask assembly. 
     
     
         12 . The mask support of  claim 1 , wherein at least a portion of said first elastic element and a portion of said second elastic element are made of different materials. 
     
     
         13 . The mask support of  claim 1 , wherein at least a portion of said first elastic element and a portion of said second elastic element have different thickness. 
     
     
         14 . A mask assembly provided for attaching a mask to a mask support according to  claim 1 , wherein said connecting means comprises at least a second engagement means for mutual engagement with the first engagement means of said mask support. 
     
     
         15 . The mask assembly of  claim 14 , wherein said second engagement means comprises a cramp formed by bending at least an edge portion of said mask assembly relative to the surface of the mask.

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