Device formed by probe-based lithography utilizing thermomechanically activated polymers

Abstract

Device having features formed utilizing probe-based lithography, including: depositing a preceramic polymer on a substrate; writing nanoscale features in the polymer by locally transforming the preceramic polymer via a chemical reaction causing it to undergo a permanent phase change into hardened, ceramic material, the chemical reaction activated with a prescribed activation energy supplied by heat and/or pressure applied by a probe tip; depositing new layers and continuing according to a desired three-dimensional pattern; by cross-linking unactivated preceramic polymer to act as a support medium that isolates a formed ceramic structure mechanically and/or electrically; and where the ceramic pattern is made electrically conductive by (a) incorporating dopant elements into or onto the preceramic polymer, or (b) performing the write step in a chemically-active environment that supplies dopant atoms during the chemical reaction.

1 . A device, comprising:
 a substrate;   a plurality of preceramic polymer layers that have been deposited on the substrate;   nanoscale features configured as indented electrically conductive patterns in the preceramic polymer layers, the conductive patterns having been formed by locally transforming the preceramic polymer via a chemical reaction causing a permanent phase change into a hardened electrically conductive ceramic material, wherein the chemical reaction is activated by heat and/or pressure applied by a nanoscale probe tip;   wherein the preceramic polymer layers, other than the electrically conductive nanoscale features, comprise non-electrically conductive cross-linked unactivated preceramic polymer that acts as a support medium and that isolates the electrically conductive nanoscale features both mechanically and electrically to form the device.