Optical component quartz glass

Abstract

Starting from an optical component of quartz glass for transmitting ultraviolet radiation of a wavelength between 190 nm and 250 nm, with a glass structure essentially without oxygen defects, a hydrogen content ranging from 0.1×10 16 molecules/cm 3 to 5.0×10 16 molecules/cm 3 , and with a content of SiH groups of less than 5×10 16 molecules/cm 3 , to provide such a component which is particularly well suited for use with linearly polarized UV laser radiation, the present invention suggests that the component should have a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C.

1 . An optical component of quartz glass for transmitting ultraviolet radiation of a wavelength in a range of 190 nm to 250 nm, said optical component comprising quartz glass having a glass structure substantially without oxygen defects, having a hydrogen content ranging from 0.1×10 16  molecules/cm 3  to 5.0×10 16  molecules/cm 3 , and having a content of SiH groups of <less than 5×10 16  molecules/cm 3 , wherein the quartz glass has a content of hydroxyl groups ranging from 10 to 250 wt ppm and a fictive temperature above 1000° C. 
     
     
         2 . The optical component according to  claim 1 , wherein the fictive temperature is above 1050° C. 
     
     
         3 . The optical component according to  claim 1 , wherein the content of hydroxyl groups is in a range of 30 to 200 wt ppm. 
     
     
         4 . The optical component according to  claim 1 , wherein the quartz glass has a content of fluorine below 100 wt ppm. 
     
     
         5 . (canceled) 
     
     
         6 . (canceled) 
     
     
         7 . (canceled) 
     
     
         8 . (canceled) 
     
     
         9 . (canceled) 
     
     
         10 . (canceled) 
     
     
         11 . (canceled) 
     
     
         12 . (canceled) 
     
     
         13 . (canceled) 
     
     
         14 . (canceled) 
     
     
         15 . (canceled) 
     
     
         16 . The optical component according to  claim 1 , wherein the fictive temperature is above 1100° C. 
     
     
         17 . The optical component according to  claim 3 , wherein the content of hydroxyl groups is below 125 wt ppm.