Method for die bonding having pick-and-probing feature
Abstract
Disclosed is a die-bonding method having pick-and-probe features after wafer sawing where at least a die is probed and sorted according to different grades during a pick-and-place step performed after wafer sawing. A suction nozzle having a plurality of probes is utilized to probe the electrical terminals of the die. After picking, the suction nozzle is moved on a common moving path and the picked die is tested through the suction nozzle. The picked-and-probed die is moved and die-bonded to a die carrier loaded in a corresponding one of a plurality of die-bonding areas by moving the Suction nozzle on a chosen sorting path. Therefore, the die is probed and sorted during die-bonding processes. Higher graded dice at a same level are assembled on a same die carrier to form a higher graded semiconductor package.
Claims
exact text as granted — not AI-modified1 . A die-bonding method with pick-and-probe features after wafer sawing, primarily comprising the steps of:
providing at least a die having a plurality of electrical terminals, wherein the die is loaded in a loading area; providing a plurality of die carriers loaded in a plurality of die-bonding areas, wherein the die-bonding areas are sorted for different graded dice; and performing a pick-and-place step by utilizing at least a suction nozzle having a plurality of probes, wherein the pick-and-place step includes:
picking up the die in the loading area wherein the probes probe the electrical terminals of the die at the same time;
testing the picked up die for evaluating its grades and moving the suction nozzle on a common moving path from the loading area toward the die-bonding areas;
choosing a corresponding one of a plurality of sorting paths according to the grade of the die, wherein the sorting paths connect the common moving path to the die-bonding areas respectively;
moving the suction nozzle to the corresponding one of the die-bonding areas; and
bonding the die picked by the suction nozzle to the corresponding die carrier in the corresponding die-bonding area.
2 . The method as claimed in claim 1 , wherein the step of testing the picked up die is completed and merged during the suction nozzle is moving on the common moving path.
3 . The method as claimed in claim 1 , wherein the die carrier is a substrate.
4 . The method as claimed in claim 1 , wherein the die carrier is a semiconductor die.
5 . The method as claimed in claim 1 , wherein the suction nozzle has a vacuum hole and is in contact with an active surface of the die when picking.
6 . The method as claimed in claim 5 , wherein the plurality of probes are formed in the vacuum hole of the suction nozzle.
7 . The method as claimed in claim 1 , wherein the die in the loading area is attached to a wafer saw tape.Join the waitlist — get patent alerts
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