US2009219504A1PendingUtilityA1
Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
Est. expiryOct 26, 2024(expired)· nominal 20-yr term from priority
Inventors:Noriyuki Hirayanagi
H10P 72/3302H10P 72/0474H10P 72/0464G03F 1/48B82Y 10/00G03F 1/62B82Y 40/00G03F 7/70983G03F 1/24G03F 7/70733G03F 7/70741G03F 7/7075G03F 7/70916G03F 1/66B25J 11/0095G03F 7/70908H10P 72/7602
55
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Claims
Abstract
A substrate conveyor apparatus carries a substrate on which patterns are formed, carries the substrate in a state protected by a protective cover when the substrate is not used, and carries a cover protection means that covers the inner surface of the protective cover when the substrate is used. The substrate conveyor apparatus has a grounding means that grounds the substrate or the protective cover.
Claims
exact text as granted — not AI-modified1 - 14 . (canceled)
15 . A substrate conveyor apparatus for carrying a substrate on which patterns are formed, the substrate conveyor apparatus comprising: a protective cover for protecting the substrate when the substrate is not used, and a grounding means for grounding the substrate or the protective cover.
16 . The substrate conveyor apparatus described in claim 15 , wherein the grounding means is provided on a setting machine that sets the substrate or the protective cover.
17 . The substrate conveyor apparatus described in claim 15 , wherein the substrate is grounded via the protective cover.
18 . (canceled)
19 . (canceled)
20 . An exposure apparatus comprising the substrate conveyor apparatus described in claim 15 .
21 . (canceled)Join the waitlist — get patent alerts
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