US2009212658A1PendingUtilityA1
Micro--electromechanical actuator with spacer separated layers
Est. expiryOct 20, 2020(expired)· nominal 20-yr term from priority
B81B 3/0035F05C 2203/0813F05C 2251/044H01H 1/0036F05C 2251/046F05C 2203/083F05C 2251/04B41J 2/14427H01H 2061/006B81B 3/0024B81B 2201/038H01H 2061/008B81C 99/006B81B 7/00F03G 7/066F03G 7/064F03G 7/0613
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Claims
Abstract
A micro-electromechanical actuator comprising a pair of elongate layers of identical material heated by an electrical current; a pair of spacers separating the elongate layers at two opposite ends, the spacers fast with the layers; and an air gap provided between the pair of elongate layers. Each spacer is composed of a thermally non-conductive material.
Claims
exact text as granted — not AI-modified1 . A micro-electromechanical actuator comprising:
a pair of elongate layers of identical material heated by an electrical current; a pair of spacers separating the elongate layers at two opposite ends, the spacers fast with the layers; and an air gap provided between the pair of elongate layers, wherein each spacer is composed of a thermally non-conductive material.
2 . A micro-electromechanical actuator as claimed in claim 1 , wherein each elongate layer is composed of a thermally conductive material.
3 . A micro-electromechanical actuator as claimed in claim 1 , wherein each spacer is substantially block shaped.
4 . A micro-electromechanical actuator as claimed in claim 1 , wherein each elongate layer has a resistivity between 0.1 μΩm and 10.0 μΩm and is chemically inert in air.
5 . A micro-electromechanical actuator as claimed in claim 1 , wherein the pair of elongate layers are made of Titanium Nitride.Join the waitlist — get patent alerts
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