Cmos structures and methods using self-aligned dual stressed layers

Abstract

A CMOS structure and methods for fabricating the CMOS structure provide that a first stressed layer located over a first transistor and a second stressed layer located over a second transistor abut but do not overlap. Such an abutment absent overlap provides for enhanced manufacturing flexibility when forming a contact to a silicide layer upon a source/drain region within one of the first transistor and the second transistor.

1 . A CMOS structure comprising:
 a first transistor of a first polarity located laterally separated from a second transistor of a second polarity different from the first polarity over a semiconductor substrate; and   a first stressed layer having a first stress located over the first transistor and a second stressed layer having a second stress different from the first stress located over the second transistor, where the first stressed layer and the second stressed layer abut and do not overlap.   
   
   
       2 . The CMOS structure of  claim 1  wherein:
 the semiconductor substrate comprises a hybrid orientation substrate; and   the first transistor and the second transistor use different crystallographic orientation channel regions.   
   
   
       3 . The CMOS structure of  claim 1  wherein the first stressed layer and the second stressed layer abut, but do not overlap at a location over a source/drain region within one of the first transistor and the second transistor. 
   
   
       4 . The CMOS structure of  claim 3  further comprising a silicide layer located upon the source/drain region. 
   
   
       5 . The CMOS structure of  claim 1  wherein each of the first stressed layer and the second stressed layer comprises a nitride material. 
   
   
       6 . The CMOS structure of  claim 1  wherein:
 the first stress is a tensile stress and the first transistor is an nFET; and   the second stress is a compressive stress and the second transistor in a pFET.   
   
   
       7 . A method for fabricating a CMOS structure comprising:
 forming a first transistor of a first polarity laterally separated from a second transistor of a second polarity different from the first polarity over a semiconductor substrate;   forming a first stressed layer having a first stress located over the first transistor and a second stressed layer having a second stress different from the first stress located over the second transistor, where the first stressed layer and the second stressed layer abut and overlap; and   etching at least one of the first stressed layer and the second stressed layer so that the first stressed layer and the second stressed layer abut and do not overlap.   
   
   
       8 . The method of  claim 7  wherein the forming the first transistor and the second transistor uses a hybrid orientation substrate that provides a different crystallographic orientation channel for each of the first transistor and the second transistor. 
   
   
       9 . The method of  claim 7  wherein each of the first stressed layer and the second stressed layer comprises a nitride material. 
   
   
       10 . The method of  claim 7  wherein:
 the first stress is a tensile stress and the first transistor is an nFET; and   the second stress is a compressive stress and the second transistor in a pFET.   
   
   
       11 . The method of  claim 7  wherein the etching provides that the first stressed layer and the second stressed layer abut but do not overlap over a source/drain region within one of the first transistor and the second transistor. 
   
   
       12 . The method of  claim 7  wherein the etching of the first stressed layer and the second stressed layer is undertaken absent masking of the first stressed layer and the second stressed layer.