Micromachined mover

Abstract

A micromachined mover includes a rotor substrate and a stator substrate. A suspension is configured to couple the rotor substrate to the stator substrate and allow relative movement therebetween in a plane of the substrates. The suspension is positioned on an interior portion of the substrates.

1 . A micromachined mover, comprising:
 a moving substrate;   a stator substrate;   a suspension configured to couple the moving substrate to the stator substrate and allow relative movement therebetween in a plane of the substrates; and   wherein the suspension is positioned on an interior portion of the substrates.   
     
     
         2 . The apparatus of  claim 1  wherein the suspension is positioned proximate a center of the moving substrate. 
     
     
         3 . The apparatus of  claim 1  wherein the suspension couples to the moving substrate to the stator substrate and allows relative movement therebetween. 
     
     
         4 . The apparatus of  claim 1  including a storage medium and a transducing head coupled to the moving substrate and the suspension arranged to provide relative movement therebetween in the plane of the substrates. 
     
     
         5 . The apparatus of  claim 4  wherein the transducing head is carried on a head substrate. 
     
     
         6 . The apparatus of  claim 4  wherein the storage medium is carried on the moving substrate. 
     
     
         7 . The apparatus of  claim 1  wherein the suspension is formed in the moving substrate. 
     
     
         8 . The apparatus of  claim 1  wherein the suspension is formed in the stator substrate. 
     
     
         9 . The apparatus of  claim 1  including a second suspension and wherein the suspensions are surrounded by the moving substrate. 
     
     
         10 . The apparatus of  claim 1  including capacitance position sensing electrodes and actuator electrodes positioned on the moving substrate and the stator substrate. 
     
     
         11 . The apparatus of  claim 1  including a seal which seals the moving substrate. 
     
     
         12 . The apparatus of  claim 7  including a seal which seals the suspension. 
     
     
         13 . The apparatus of  claim 1  wherein the stator substrate includes a depression formed therein and the moving substrate is positioned in the depression. 
     
     
         14 . A method of moving a micromachined moving substrate, comprising:
 providing a stator substrate;   providing a suspension which allows movement between the moving substrate and the stator substrate;   coupling the moving substrate to the stator substrate with the suspension, wherein the suspension is surrounded by the moving substrate; and   moving the moving substrate relative to the stator substrate.   
     
     
         15 . The method of  claim 14  wherein the suspension is positioned proximate a center of the moving substrate. 
     
     
         16 . The method of  claim 14  including providing a storage medium on the moving substrate and a transducing head coupled to the moving substrate and the suspension arranged to provide relative movement therebetween in the plane of the substrates. 
     
     
         17 . The method of  claim 16  wherein the transducing head is carried on a head substrate. 
     
     
         18 . The method of  claim 14  including forming the suspension in the moving substrate. 
     
     
         19 . The method of  claim 14  including forming the suspension in the stator substrate. 
     
     
         20 . The method of  claim 14  including a seal which seals the moving substrate. 
     
     
         21 . The method of  claim 14  including forming a depression in the stator substrate and positioning the moving substrate in the depression.