Self-assembly micro blade

Abstract

The present invention relates to a self-assembly micro blade applied to a micro fan. The micro fan combines at least a self-assembly micro blade and a motor using an actuator as the main body of the micro fan. The self-assembly micro blade includes at least a movable part of a microstructure, at least an elastic joint provided between an outer ring of the micro fan and the movable part. The elastic joint is composed of a polyimide film, which is heated to contract and generate surface tension by using a reflow process so as to lift up the movable part of the microstructure; moreover, the movable part is bent in a curved form through the elastic link exhibits a multi-layer shape by serially connecting at least two movable parts so as to complete the self assembly of the micro blade, thereby increasing air flow rate and improving air flow length.

1 . A self-assembly micro blade, comprising:
 at least a movable part of a microstructure;   at least an elastic joint provided between the movable part and an outer ring of a micro motor, and generating surface tension to lift up the movable part of the microstructure by using a reflow process.   
   
   
       2 . The self-assembly micro blade as set forth in  claim 1 , wherein the elastic joint is a photosensing polyimide film. 
   
   
       3 . The self-assembly micro blade as set forth in  claim 1 , wherein a method for manufacturing the self-assembly micro blade comprises processes of:
 (1) depositing a low-stress sacrifice layer on a silicon substrate and depositing a main structure layer on the low-stress sacrifice layer;   (2) defining the main structure layer to etch out an overall profile of the microstructure;   (3) coating a photosensing polyimide film on the main structure layer and an outer ring of the micro motor;   (4) defining the polyimide film to etch out a form of an elastic joint;   (5) performing wet etch to etch and release a preset portion of the low-stress sacrifice layer; and   (6) performing a reflow process to heat up the elastic joint to result in thermal contraction and lifting up a preset portion of the main structure layer.   
   
   
       4 . The self-assembly micro blade as set forth in  claim 3 , wherein the low-stress sacrifice layer is a phosphosilicate glass (PSG). 
   
   
       5 . The self-assembly micro blade as set forth in  claim 3 , wherein the main structure layer is a polysilicon. 
   
   
       6 . A self-assembly micro blade, comprising:
 at least a movable part of a microstructure; and   at least an elastic joint provided between the movable part and an outer ring of a micro motor; and   an elastic link provided on each movable part, so that surface tension is generated by each of the elastic joint and the elastic link through a reflow process and the movable part of the microstructure is lifted up and bent in form of curved surface;   
   
   
       7 . The self-assembly micro blade as set forth in  claim 6 , wherein the elastic joint is a photosensing polyimide film. 
   
   
       8 . The self-assembly micro blade as set forth in  claim 6 , wherein a first elastic joint is defined on a first side of the movable part. 
   
   
       9 . The self-assembly micro blade as set forth in  claim 6 , wherein a second elastic joint is defined on a second side of the movable part. 
   
   
       10 . The self-assembly micro blade as set forth in  claim 6 , wherein an elastic link is defined above the first elastic joint on each of the movable part. 
   
   
       11 . The self-assembly micro blade as set forth in  claim 6 , wherein a third elastic joint is defined above the elastic link on the movable part. 
   
   
       12 . The self-assembly micro blade as set forth in  claim 6 , wherein the elastic link is a photosensing polyimide film. 
   
   
       13 . A self-assembly micro blade, comprising:
 at least a first movable part and a second movable part of a microstructure; and   at least an elastic joint provided between the first movable part and an outer ring of a micro motor and between the first movable part and the second movable part respectively; and   an elastic link is provided on each second movable part, so that surface tension is generated by each of the elastic joint and the elastic link through a reflow process and the movable part of the microstructure is lifted up and bent in form of multiple layers and curved plane.   
   
   
       14 . The self-assembly micro blade as set forth in  claim 13 , wherein the elastic joint is a photosensing polyimide film. 
   
   
       15 . The self-assembly micro blade as set forth in  claim 13 , wherein a first elastic joint is defined on each of the first movable part. 
   
   
       16 . The self-assembly micro blade as set forth in  claim 13 , wherein a second elastic joint is defined on a first side of each of the second movable part. 
   
   
       17 . The self-assembly micro blade as set forth in  claim 13 , wherein a third elastic joint is defined on a second side of each of the second movable part. 
   
   
       18 . The self-assembly micro blade as set forth in  claim 13 , wherein an elastic link is defined above the second elastic joint of each of the second movable part. 
   
   
       19 . The self-assembly micro blade as set forth in  claim 13 , wherein a fourth elastic joint is defined above the elastic link of each of the second movable part. 
   
   
       20 . The self-assembly micro blade as set forth in  claim 13 , wherein the elastic link is a photosensing polyimide film.