Method and system for handling objects in chambers

Abstract

Techniques for transferring workpieces from one chamber to another chamber are disclosed. According to one aspect of the techniques, a treatment system includes a load lock chamber, a transfer chamber and one or more process chambers. The load lock chamber is provided to receive workpieces for treatment or process in one or more process chambers. The transfer chamber is provided as a mechanism to move workpieces from one chamber to another chamber. The process chamber includes a set of electrodes used to treat the workpieces with other materials. To facilitate the transfer of the workpieces, the process chamber is designed to position each of the workpieces vertically between a pair of electrodes, where each of the workpieces is removably held up by a fixture. Depending on implementation, the workpieces may be mounted on one fixture or multiple fixtures respectively. The fixture(s) is then mounted to a moving mechanism that facilitates the fixture(s) to move from one chamber to another chamber.

1 . A system for handling workpieces in chambers, the system comprising:
 a process chamber with a plurality of vertically aligned electrodes mounted in the process chamber; and   a platform, including at least one fixture, that is removably positioned in the chamber to hold a plurality of workpieces vertically.   
   
   
       2 . The system as recited in  claim 1 , wherein the platform is transferred using rollers. 
   
   
       3 . The system as recited in  claim 2 , further comprising a rotary stage in a chamber having an opening connected to the process chamber. 
   
   
       4 . The system as recited in  claim 3 , further comprising outlets arranged on at least one of the electrodes. 
   
   
       5 . The system as recited in  claim 1 , wherein the platform is transferred using rails. 
   
   
       6 . The system as recited in  claim 5 , further comprising a rotary stage with rails in a chamber having an opening connected to a process chamber. 
   
   
       7 . The system as recited in  claim 6 , further comprising outlets arranged on at least one of the electrodes. 
   
   
       8 . The system as recited in  claim 7 , further comprising a transfer device which provides a horizontal movement for transporting the fixture. 
   
   
       9 . The system as recited in  claim 1 , further comprising a mechanical manipulator provided to move the platform in and out a chamber, where functions of the manipulator include:
 raising the platform;   moving the platform in the horizontal direction;   rotating the platform about a vertical axis.   
   
   
       10 . The system as recited in  claim 9 , further comprising outlets arranged on at least one of the electrodes 
   
   
       11 . A system for handling workpieces in chambers, the system comprising:
 at least a process chamber including a plurality of RF electrodes and ground electrodes; and   a platform, being accommodated in the process chamber, including at least one fixture configured to hold a plurality of workpieces vertically, each of the workpieces being positioned between one of the RF electrodes and one of the ground electrodes, wherein, when the platform is caused to move out or in the process chamber by a moving mechanism, the workpieces are moved out or in the process chamber simultaneously.   
   
   
       12 . The system as recited in  claim 11 , wherein the moving mechanism includes rollers, wheels running in rails and a transfer device, and studs or a manipulator. 
   
   
       13 . The system as recited in  claim 11 , wherein the platform includes a plurality of fixtures, each configured to hold one of the workpieces. 
   
   
       14 . The system as recited in  claim 11 , further comprising:
 a load lock chamber for receiving the workpieces and placing the workpieces in the platform; and   a transfer chamber including a rotary stage being rotated to the load lock chamber to receive the platform from the load lock chamber.   
   
   
       15 . The system as recited in  claim 14 , wherein there are N RF electrodes interleaving N+1 ground electrodes, where N is a finite odd integer. 
   
   
       16 . The system as recited in  claim 15 , wherein the N RF electrodes is arranged symmetrically, each of the workpieces is placed between one of the RF electrodes and one of the N+1 ground electrodes with a back face closer to the one of the N+1 ground electrodes. 
   
   
       17 . The system as recited in  claim 11 , wherein the platform includes a fixture with the holders to hold the workpieces steady, the fixture is placed on an array of rollers to be moved in or out the process chamber. 
   
   
       18 . The system as recited in  claim 11 , wherein the platform includes a number of fixtures, each with a pair of holders to hold one of the workpieces steady and mounted with a set of rollers to be moved in or out the process chamber. 
   
   
       19 . The system as recited in  claim 11 , wherein the platform includes a fixture with the holders to hold the workpieces steady, the fixture is placed on a set of studs to form a void underneath so that a mechanical arm can reach a bottom of the fixture to raise the fixture to be moved in or out the process chamber. 
   
   
       20 . The system as recited in  claim 11 , further comprising a transfer device to transfer the platform in or out the process chamber.