US2009165831A1PendingUtilityA1

System for megasonic processing of an article

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Individually held — no corporate assignee on recordPriority: Sep 30, 1996Filed: Mar 6, 2009Published: Jul 2, 2009
Est. expirySep 30, 2016(expired)· nominal 20-yr term from priority
Inventors:Mario E. Bran
H10P 72/0416H10P 72/0414H10P 70/00H10P 52/00B06B 3/00B08B 3/12Y10S134/902B08B 17/02
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Claims

Abstract

A system for megasonic processing of an article. In one aspect, the system for megasonic processing comprises a rotary support for supporting an article, a dispenser for applying a fluid to a surface of an article positioned on the rotary support; and a transducer assembly. The transducer assembly comprises (i) a transmitter positioned adjacent to the article on the rotary support so that when the fluid is applied to the surface of the article via the dispenser, a meniscus of the fluid is formed between a portion of the transmitter and the surface of the article and (ii) not more than one transducer coupled to the transmitter, the transducer adapted to oscillate at a frequency for propagating megasonic energy through the transmitter and into the meniscus of the fluid.

Claims

exact text as granted — not AI-modified
1 . A system for megasonic processing of an article comprising:
 a rotary support for supporting an article;   a dispenser for applying a fluid to a surface of an article positioned on the rotary support; and   a transducer assembly comprising (i) a transmitter positioned adjacent to the article on the rotary support so that when the fluid is applied to the surface of the article via the dispenser, a meniscus of the fluid is formed between a portion of the transmitter and the surface of the article and (ii) not more than one transducer coupled to the transmitter, the transducer adapted to oscillate at a frequency for propagating megasonic energy through the transmitter and into the meniscus of the fluid.

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