Hydrogen-containing carbon film

Abstract

To provide a hydrogen-containing carbonaceous membrane having a novel property. For example, the hydrogen-containing carbonaceous membrane may be effectively prevented from delamination from a substrate. A hydrogen-containing carbonaceous membrane includes carbon and hydrogen. The membrane has a hydrogen content of more than 50 atomic percent and less than 65 atomic percent and a density of more than 1.3 g/cm 3 and less than 1.5 g/cm 3 . Another hydrogen-containing carbonaceous membrane has a hydrogen content of more than 0 atomic percent and less than 50 atomic percent and a density of more than 1.4 g/cm 3 and less than 1.9 g/cm 3 .

1 . A hydrogen-containing carbonaceous membrane comprising carbon and hydrogen, wherein the hydrogen-containing carbonaceous membrane has a hydrogen content of more than 50 atomic percent and less than 65 atomic percent, and wherein the hydrogen-containing carbonaceous membrane has a density of more than 1.3 grams per cubic centimeter (g/cm 3 ) and less than 1.5 g/cm 3 . 
   
   
       2 . The hydrogen-containing carbonaceous membrane according to  claim 1 , wherein the hydrogen-containing carbonaceous membrane has a compressive stress. 
   
   
       3 . The hydrogen-containing carbonaceous membrane according to  claim 2 , wherein the compressive stress is more than 0.01 gigapascal (GPa) and less than 1 GPa. 
   
   
       4 . The hydrogen-containing carbonaceous membrane according to  claim 1 , wherein the hydrogen-containing carbonaceous membrane has a spin density of less than 5×10 16  spins per cubic centimeter (spins/cm 3 ). 
   
   
       5 . A hydrogen-containing carbonaceous membrane comprising carbon and hydrogen, wherein the hydrogen-containing carbonaceous membrane has a hydrogen content of more than 0 atomic percent and less than 50 atomic percent, and wherein the hydrogen-containing carbonaceous membrane has a density of more than 1.4 g/cm 3  and less than 1.9 g/cm 3 . 
   
   
       6 . The hydrogen-containing carbonaceous membrane according to  claim 5 , wherein the hydrogen-containing carbonaceous membrane has a tensile stress. 
   
   
       7 . The hydrogen-containing carbonaceous membrane according to  claim 6 , wherein the tensile stress is more than 0.05 GPa and less than 1 GPa. 
   
   
       8 . The hydrogen-containing carbonaceous membrane according to  claim 5 , wherein the hydrogen-containing carbonaceous membrane has a spin density of more than 1×10 17  spins/cm 3  and less than 1×10 20  spins/cm 3 . 
   
   
       9 . A hydrogen-containing carbonaceous membrane comprising carbon and hydrogen, wherein the hydrogen-containing carbonaceous membrane includes at least one region and another region, the region having a hydrogen content of more than 50 atomic percent, and the other region having a hydrogen content of less than 50 atomic percent. 
   
   
       10 . The hydrogen-containing carbonaceous membrane according to  claim 9 , wherein the region having a hydrogen content of more than 50 atomic percent comprises the hydrogen-containing carbonaceous membrane according to  claim 1 , and wherein the region having a hydrogen content of less than 50 atomic percent comprises the hydrogen-containing carbonaceous membrane according to  claim 5 . 
   
   
       11 . The hydrogen-containing carbonaceous membrane according to  claim 9 , wherein the region having a hydrogen content of more than 50 atomic percent comprises a region having a relatively low refractive index, and wherein the region having a hydrogen content of less than 50 atomic percent comprises a region having a relatively high refractive index. 
   
   
       12 . The hydrogen-containing carbonaceous membrane according to  claim 9 , wherein the region having a hydrogen content of more than 50 atomic percent comprises a region having a relatively high electric resistivity, and wherein the region having a hydrogen content of less than 50 atomic percent comprises a region having a relatively low electric resistivity. 
   
   
       13 . The hydrogen-containing carbonaceous membrane according to  claim 5 , wherein the hydrogen-containing carbonaceous membrane has a distribution of hydrogen content in a thickness direction. 
   
   
       14 . The hydrogen-containing carbonaceous membrane according to  claim 9 , wherein the hydrogen-containing carbonaceous membrane has a distribution of hydrogen content in a thickness direction.