Multi-zone pressure control system

Abstract

A pressure control system that controls the pressure of a fluid in a plurality of zones includes a distribution manifold, at least one main manifold connected to the distribution manifold, and at least one disposable manifold connected to the distribution manifold and the main manifold. The disposable manifold is adapted to be replaced independent of the distribution manifold and the main manifold, and is connected to each zone and to at least one vacuum source. The distribution manifold distributes the fluid to the plurality of zones, so as to cause flow of the fluid into and out of a measurement chamber located within each zone. The main manifold includes, for each zone, a pressure sensor configured to measure pressure in the measurement chamber in that zone, and a control valve configured to regulate the flow of the fluid through that zone.

1 . A pressure control system for controlling pressure of a fluid in a plurality of zones, the pressure control system comprising:
 a distribution manifold configured to distribute the fluid from a pressurized source of the fluid to the plurality of zones, so as to cause flow of the fluid into and out of a measurement chamber located within each zone;   at least one main manifold connected to the distribution manifold, the main manifold including, for each zone, a pressure sensor configured to measure pressure in the measurement chamber in that zone, and a control valve configured to regulate the flow of the fluid through that zone; and   at least one disposable manifold connected to the distribution manifold and the main manifold and adapted to be replaced independent of the distribution manifold and the main manifold, the disposable manifold connected to each zone and to at least one vacuum source.   
   
   
       2 . The pressure control system of  claim 1 , wherein the disposable manifold comprises:
 for each zone, a zone port configured to connect the disposable manifold to that zone; and   one or more vacuum ports configured to connect the disposable manifold to the vacuum source.   
   
   
       3 . The pressure control system of  claim 2 , wherein the disposable manifold further comprises:
 for each zone, a valve connected to the vacuum source and configured to decrease the pressure of the fluid flowing through that zone; and   for each zone, a valve configured to slow down a rate of decrease of the pressure of the fluid flowing through that zone.   
   
   
       4 . The pressure control system of  claim 1 , wherein the main manifold is adapted to be replaced independent of the distribution manifold and the disposable manifold. 
   
   
       5 . The pressure control system of  claim 1 , wherein the distribution manifold comprises:
 a pressure inlet port in communication with the pressurized source of the fluid via a pressure line; and   a vacuum outlet port that connects the distribution manifold to a vacuum outlet via a vacuum line.   
   
   
       6 . The pressure control system of  claim 1 ,
 wherein the fluid comprises a gas; and   wherein the measurement chamber comprises a bladder in a CMP carrier head.   
   
   
       7 . The pressure control system of  claim 6 ,
 wherein the gas comprises nitrogen.   
   
   
       8 . The pressure control system of  claim 1 , wherein at least one of the plurality of zones is located remote from the pressure sensor and from the control valve. 
   
   
       9 . The pressure control system of  claim 1 , wherein at least some of the zones are coupled to each other. 
   
   
       10 . The pressure control system of  claim 1 , wherein the at least one main manifold comprises:
 a main manifold assembly, the main manifold assembly including a plurality of main manifolds, each one of the main manifolds connected to a respective one of the plurality of zones.   
   
   
       11 . The pressure control system of  claim 1 , wherein the at least one disposable manifold comprises a disposable manifold assembly, the disposable manifold assembly including a plurality of disposable manifolds, each one of the disposable manifolds connected to a respective one of the plurality of zones. 
   
   
       12 . The pressure control system of  claim 1 , wherein at least some of the zones have pressure control ranges that are different from one another. 
   
   
       13 . A disposable manifold for a multi-zone pressure control system configured to control pressure of a fluid in a plurality of zones, the disposable manifold comprising:
 one or more vacuum ports configured to connect the disposable manifold to a vacuum source; and   for each zone:   a zone port configured to connect the disposable manifold to that zone;   a valve connected to the vacuum source and configured to decrease the pressure of the fluid flowing through that zone; and   a valve configured to slow down a rate of decrease of the pressure of the fluid flowing through that zone;   wherein the disposable manifold is connected to a distribution manifold configured to receive the fluid from a pressurized source of the fluid and to cause the fluid to flow through the plurality of zones, and to a main manifold that includes, for each zone, a pressure sensor configured to measure pressure in a measurement chamber in that zone and a control valve configured to regulate the flow of the fluid through that zone; and   wherein the disposable manifold is adapted to be replaced independent of the distribution manifold and the main manifold.   
   
   
       14 . A main manifold for a multi-zone pressure control system configured to control pressure of a fluid in a plurality of zones, the main manifold comprising:
 for each zone: a pressure sensor configured to measure pressure of the fluid in a measurement chamber in that zone, and a control valve configured to regulate the flow of the fluid through that zone;   wherein the main manifold is connected to a distribution manifold configured to receive the fluid from a pressurized source of the fluid and to cause the fluid to flow through the plurality of zones, and to a disposable manifold that is adapted to be replaced independent of the distribution manifold and the main manifold and that is in communication with the plurality of zones and with a vacuum source for the pressure control system.   
   
   
       15 . The main manifold of  claim 14 , wherein the main manifold is adapted to be replaced independent of the distribution manifold and the disposable manifold. 
   
   
       16 . A CMP (chemical mechanical polishing) carrier head comprising:
 a carrier head including a plurality of bladders;   a pressure control system configured to control pressure of a fluid in the bladders, the pressure control system including a distribution manifold, at least one main manifold coupled to the distribution manifold, and at least one disposable manifold adapted to be replaced independent of the distribution manifold; wherein the distribution manifold is configured to distribute the fluid from a pressurized source to the bladders; the main manifold includes, for each bladder, a pressure sensor configured to measure pressure in that bladders and a control valve configured to regulate the flow of the fluid through that bladder; and the disposable manifold is connected to at least one vacuum source and to each bladder; and   a rotary coupling between the carrier head and the pressure control system.