Scanned Beam Display and Method of Operating

Abstract

A MEMS oscillator, such as a MEMS scanner, has an improved and simplified drive scheme and structure. Drive impulses may be transmitted to an oscillating mass via torque through the support arms. For multi-axis oscillators drive signals for two or more axes may be superimposed by a driver circuit and transmitted to the MEMS oscillator. The oscillator responds in each axis according to its resonance frequency in that axis. The oscillator may be driven resonantly in some or all axes. Improved load distribution results in reduced deformation. A simplified structure offers multi-axis oscillation using a single moving body. Another structure directly drives a plurality of moving bodies. Another structure eliminates actuators from one or more moving bodies, those bodies being driven by their support arms.

1 - 58 . (canceled) 
   
   
       59 . A method for driving a MEMS scanner, comprising:
 generating a single drive signal that includes frequency components at first and second frequencies; and   transmitting the single drive signal to a single mirror MEMS scanner having resonant responses at one or more of the first and second frequencies, wherein the single mirror MEMS scanner responds with a first periodic motion at the first frequency and a second periodic motion at the second frequency, and wherein the step of generating a single drive signal includes generating a ramp waveform at the second frequency.   
   
   
       60 . The method for driving a MEMS scanner of  claim 59 , further comprising the receiving a position signal from the single mirror MEMS scanner. 
   
   
       61 . The method of driving a MEMS scanner of  claim 60 , further comprising modifying the drive signal to achieve a desired motion in at least one axis in response to the position signal. 
   
   
       62 . The method of driving a MEMS scanner of  claim 59 , wherein the single mirror MEMS scanner is an electromagnetic beam director. 
   
   
       63 . The method of driving a MEMS scanner of  claim 59 , wherein the single mirror MEMS scanner is an electromagnetic beam deflector. 
   
   
       64 . The method of driving a MEMS scanner of  claim 59 , wherein the single drive signal includes multiplexed first and second frequencies. 
   
   
       65 . The method of driving a MEMS scanner of  claim 59 , wherein the single drive signal is separated into frequency components by a resonant response of the single mirror MEMS scanner. 
   
   
       66 . A scanned beam display, comprising:
 a controller, wherein the controller generates a single drive signal that includes frequency components at first and second frequencies; and   a single mirror MEMS scanner having resonant responses at one or more of the first and second frequencies, wherein the single mirror MEMS scanner receives the single drive signal, wherein the single mirror MEMS scanner responds with a first periodic motion at the first frequency and a second periodic motion at the second frequency, wherein the single drive signal includes a ramp waveform at the second frequency, and wherein the single mirror MEMS scanner raster scans one or more beams of light to create an image on a surface external to the scanned beam display.   
   
   
       67 . The scanned beam display of  claim 66 , wherein the first periodic motion is at a first resonant frequency of the single mirror MEMS scanner. 
   
   
       68 . The scanned beam display of  claim 66 , further comprising the receiving a position signal from the single mirror MEMS scanner. 
   
   
       69 . The scanned beam display of  claim 68 , further comprising modifying the drive signal to achieve a desired motion in at least one axis in response to the position signal. 
   
   
       70 . The scanned beam display of  claim 66 , wherein the single mirror MEMS scanner is an electromagnetic beam director. 
   
   
       71 . The scanned beam display of  claim 66 , wherein the single mirror MEMS scanner is an electromagnetic beam deflector. 
   
   
       72 . The scanned beam display of  claim 66 , wherein the single drive signal includes multiplexed first and second frequencies. 
   
   
       73 . The scanned beam display of  claim 66 , wherein the single drive signal is separated into frequency components by a resonant response of the single mirror MEMS scanner. 
   
   
       74 . A method of creating a raster scanned image on a surface remote from a scanned beam display, comprising:
 a controller generating a single drive signal that includes frequency components at first and second frequencies; and   a single mirror MEMS scanner having resonant responses at one or more of the first and second frequencies receiving the single drive signal;   the single mirror MEMS scanner responding with a first periodic motion at the first frequency and a second periodic motion at the second frequency, wherein the single drive signal includes a ramp waveform at the second frequency, and   the single mirror MEMS scanner raster scanning one or more beams of light to create a raster scanned image on a surface remote from the scanned beam display.   
   
   
       75 . The method of  claim 74 , wherein the first periodic motion is at a first resonant frequency of the single mirror MEMS scanner. 
   
   
       76 . The method of  claim 74 , further comprising the receiving a position signal from the single mirror MEMS scanner. 
   
   
       77 . The method of  claim 74 , wherein the single drive signal includes multiplexed first and second frequencies. 
   
   
       78 . The method of  claim 74 , wherein the drive signal is separated into frequency components by a resonant response of the single mirror MEMS scanner.