Sheet cutting device and cutting method

Abstract

A cutting device 15 that, after a sheet S is stuck on a wafer W on a sticking table 13 , cuts the sheet S along the outer edge of the wafer. The cutting device 15 comprises a robot body 62 disposed beside the sticking table 13 and a cutter blade 63 supported by a tool holding chuck 69 positioned at the front end of the robot body 62 . The cutter blade 63 is detachably attached to the tool holding chuck so as to be replaceable and is arranged so as to cut the sheet S in a state that the posture thereof is adjusted along a preset movement track.

1 . A sheet cutting device to cut a sheet stuck on an adherend on a sticking table, comprising: a robot body and a cutter blade supported on a free-end of the robot body, wherein
 said robot body is a multi-joint robot having a plurality of joints and these joints are controlled based on numerical information.   
   
   
       2 . A sheet cutting device to cut a sheet stuck on an adherend on a sticking table, comprising: a robot body disposed beside said sticking table and a cutter blade supported on a free-end side of the robot body and arranged so as to move along a preset track, wherein
 said robot body includes a tool holding chuck on the free-end side, and the cutter blade is detachably attached thereto via the tool holding chuck.   
   
   
       3 . The sheet cutting device according to  claim 1 , wherein said cutter blade incorporates a heater therein. 
   
   
       4 . The sheet cutting device according to  claim 1 , wherein said cutter blade is arranged so as to vibrate via a vibrating device. 
   
   
       5 . The sheet cutting device according to  claim 1 , wherein said robot body supports said cutter blade so as to adjust the posture of the cutter blade when cutting the sheet along the outer periphery of said adherend. 
   
   
       6 . The sheet cutting device according to  claim 5 , wherein a posture of the cutter blade in said sheet cutting operation maintains a toe-in angle with which the center line of the cutter blade is inclined with respect to the cutting direction viewed from the top in the cutting direction, and a blade edge of the cutter blade is positioned closer to the outer periphery of the adherend than the back portion of the cutter blade. 
   
   
       7 . The sheet cutting device according to  claim 5 , wherein the posture of the cutter blade in said sheet cutting operation maintains a camber angle with which the center line of the cutter blade is inclined viewed from the front in the cutting direction, and said sheet is cut with no protrusion out of the outer periphery of said adherend. 
   
   
       8 . The sheet cutting device according to  claim 5 , wherein the posture of the cutter blade in said sheet cutting operation maintains a caster angle with which the center line of said cutter blade is inclined in the cutting direction viewed from the side in the cutting direction, and the angle formed between said sheet and the blade edge is kept at an acute angle. 
   
   
       9 . The sheet cutting device according to  claim 1 , wherein an inspection means for inspecting cutter blades is disposed in the vicinity of said robot body. 
   
   
       10 . A sheet cutting method to cut a sheet stuck on an adherend on a sticking table, wherein
 a multi-joint robot body is used, the robot having a plurality of joints controlled based on numerical information and holding a cutter blade on a free-end of the robot body in a state enabling to adjust a posture of the cutter blade, and   said sheet is cut by movement of said cutter blade along a preset track.   
   
   
       11 . A sheet cutting method to cut a sheet stuck on an adherend on a sticking table, wherein
 a cutting device is used, a robot body of which is disposed beside said sticking table and holds a cutter blade on a free end thereof in a state enabling to adjust a posture of the cutter blade, and   the cutting device includes a cutter blade and said sheet is cut by movement of said cutter blade along a preset track.   
   
   
       12 . The sheet cutting method according to  claim 10 , wherein the sheet is cut in a state that said cutter blade is heated. 
   
   
       13 . The sheet cutting method according to  claim 10 , wherein said cutter blade cuts the sheet while being vibrated. 
   
   
       14 . The sheet cutting method according to  claim 10 , wherein the cutter blade maintains a toe-in angle with which the center line of said cutter blade is inclined with respect to the cutting direction viewed from the top in the cutting direction, and the sheet is cut in a state that a blade edge of the cutter blade is positioned closer to the outer periphery of the adherend than the back portion of the cutter blade. 
   
   
       15 . The sheet cutting method according to  claim 10 , wherein the cutter blade maintains a camber angle with which the center line of said cutter blade is inclined viewed from the front in the cutting direction, and said sheet is cut with no protrusion out of the outer periphery of said adherend. 
   
   
       16 . The sheet cutting method according to  claim 10 , wherein the cutter blade maintains a caster angle with which the center line of said cutter blade is inclined in the cutting direction viewed from the side in the cutting direction, and the sheet is cut while keeping the angle formed between said sheet and the blade edge at an acute angle. 
   
   
       17 . The sheet cutting method according to  claim 10 , wherein said sheet is an adhesive sheet temporarily stuck on a strip of release liner as an adherend via an adhesive, and
 the adhesive sheet and adhesive are cut without cutting said release liner.   
   
   
       18 . The sheet cutting method according to  claim 10 , wherein said sheet is an adhesive sheet temporarily stuck on a strip of release liner as an adherend via an adhesive; and
 a partial cutting is made to form a cutoff line without completely cutting said release liner and/or adhesive sheet.