Probe card and temperature stabilizer for testing semiconductor devices

Abstract

One aspect of the invention provides an apparatus that includes a probe card [ 105] having probe needles [ 120] associated therewith. A temperature stabilizer element [ 135] is couplable to the probe card [ 105] . The temperature stabilizer [ 135] is configured to either raise or lower a temperature of the probe needles [ 120] to reduce movement of the probe needles [ 120].

1 . A semiconductor testing apparatus, comprising:
 a probe card;   a temperature stabilizer coupled to the probe card, having a direct current source and a series of P doped and N doped semiconductor material between opposing ceramic plates, operable to supply heat to the probe card with the current source applying a current directed to the P doped semiconductor material or remove heat from the probe card with the current source applying a current directed to the N doped semiconductor material.