Si-Doped GaAs Single Crystal Ingot and Process for Producing the Same, and Si-Doped GaAs Single Crystal Wafer Produced From Si-Doped GaAs Single Crystal Ingot

Abstract

This invention provides an Si doped GaAs single crystal ingot, which has a low crystallinity value as measured in terms of etch pit density (EPD) per unit area and has good crystallinity, and a process for producing the same. An Si-doped GaAs single crystal wafer produced in a latter half part in the growth of the Si doped GaAs single crystal ingot is also provided. A GaAs compound material is synthesized in a separate synthesizing oven (a crucible). An Si dopant is inserted into the compound material to prepare a GaAs compound material with the Si dopant included therein. The position of insertion of the Si dopant is one where, when the GaAs compound material is melted, the temperature is below the average temperature. After a seed crystal is inserted into a crucible for an apparatus for single crystal growth, the GaAs compound material with the Si dopant included therein and a liquid sealing compound are introduced into the crucible. The crucible is set in the apparatus for single crystal growth, where the mixture is heat melted and, while stirring the liquid sealing compound, the melt is solidified by a vertical temperature gradient method and the crystal is grown to prepare an Si doped GaAs single crystal ingot. In this case, an Si doped GaAs single crystal wafer is also produced in the latter half part of the growth of the ingot.

1 . An Si-doped GaAs single crystal ingot for producing an Si-doped GaAs single crystal wafer, wherein the Si-doped GaAs single crystal ingot is one in which
 C0.8/C0.1<2.0, where C0.1 is the carrier concentrated in a portion in which the solidification ratio of said ingot is 0.1, and C0.8 is the carrier concentration in a portion in which the solidification ration of said ingot is 0.8; and   the average value of crystallinity evaluated in terms of etch pit density is 50 etch pits/cm 2  or less in an area in which the solidification ratio is 0.1 or higher and 0.8 or lower.   
   
   
       2 . The Si-doped GaAs single crystal ingot of  claim 1 , wherein the Si-doped GaAs single crystal ingot is one which C0.8/C0.1<1.4. 
   
   
       3 . The Si-doped GaAs single crystal ingot of  claim 2 , wherein the si-doped GaAs single crystal ingot is one in which the average value of crystallinity evaluated in terms of etch pit density of 10 etch pits/cm 2  or less in an area in which the solidification ratio is 0.1 or higher and 0.8 or lower. 
   
   
       4 . The Si-doped GaAs single crystal ingot of  claim 1 , wherein the Si-doped GaAs single crystal ingot is one in which the carrier concentration is 1.0×10 17 /cm 3  or higher and 1.0×10 19 /cm 3  or lower in an area in which the solidification ratio in said ingot is 0.1 or higher and 0.8 or lower. 
   
   
       5 . An Si-doped GaAs single crystal wafer produced from an area in which said solidification ratio is 0.6 or higher and 0.8 or lower in the Si-doped GaAs single crystal ingot of  claim 1 , wherein the Si-doped GaAs single crystal wafer is one in which
 the average value of crystallinity evaluated in terms of etch pit density is 50 etch pits/cm 2  or less.   
   
   
       6 . The Si-doped GaAs single crystal wafer of  claim 5 , wherein the Si-doped GaAs single crystal wafer is one in which the average value of crystallinity evaluated in terms of etch pit density is 10 etch pits/cm 2  or less. 
   
   
       7 . The Si-doped GaAs single crystal wafer of  claim 5 , wherein the Si-doped GaAs single crystal wafer is one in which the carrier concentration is 1.0×10 17 /cm 3  or higher and 1.0×10 19 /cm 3  or lower. 
   
   
       8 . A process for producing an Si-doped GaAs single crystal ingot in which GaAs raw material, Si as a dopant raw material, and B 2 O 3  as a raw material for a liquid sealant are set in a crucible and then heated; the raw materials are melted; a layer of said liquid sealant is placed on the said GaAs raw material melt layer; and prescribed crystal growth is carried out thereafter; the process for producing an Si-doped GaAs single crystal ingot comprising:
 a step for fabricating GaAs raw material synthesized into a shape that substantially conforms to the internal shape of said crucible;   a step for placing the dopant raw material in the center of the GaAs raw material at a temperature that is lower than the average temperature of the GaAs raw material when the GaAs raw material is melted; and   a step for placing inside the crucible the GaAs raw material in which the dopant raw material is disposed, placing the raw material for the liquid sealant inside the crucible, and thereafter heating the crucible.   
   
   
       9 . The process for producing an Si-doped GaAs single crystal ingot of  claim 8 , wherein the process for producing an Si-doped GaAs single Si-doped GaAs single crystal ingot
 said crucible is heated;   the GaAs raw material, the dopant raw material, and the raw material for the liquid sealant are melted; and   a GaAs single crystal is grown while the liquid sealant is stirred using stirring means.