US2009088051A1PendingUtilityA1

Leader and trailer for linear polishing sheet

Assignee: APPLIED MATERIALS INCPriority: Sep 27, 2007Filed: Sep 26, 2008Published: Apr 2, 2009
Est. expirySep 27, 2027(~1.2 yrs left)· nominal 20-yr term from priority
B24B 37/042B24B 21/004
46
PatentIndex Score
0
Cited by
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Claims

Abstract

A polishing article includes an elongated substantially rectangular central portion and a substantially rectangular edge portion. The central portion includes a polishing layer with a polishing surface. The central portion has a width, a length greater than the width and defining a longitudinal axis, and an edge. The edge portion extends from the edge of the central portion, the edge portion is thinner than the central portion, and the polishing layer does not extend onto the edge portion.

Claims

exact text as granted — not AI-modified
1 . A polishing article, comprising:
 an elongated substantially rectangular central portion having a width, a length greater than the width and defining a longitudinal axis, and an edge, the central portion including a polishing layer with a polishing surface; and   a substantially rectangular edge portion extending from the edge of the central portion, wherein the edge portion is thinner than the central portion and the polishing layer does not extend onto the edge portion.   
   
   
       2 . The polishing article of  claim 1 , wherein the edge is a first edge and the central portion has a second edge on an opposite side of the central portion from the first edge, and where the edge portion is a first edge portion extending from the first edge, and the article further comprises a second substantially rectangular edge portion extending from the second edge of the central portion, wherein the first and second edge portions are thinner than the central portion and the polishing layer does not extend onto the first and second edge portions. 
   
   
       3 . The polishing article of  claim 2 , wherein the first edge and the second edge extend perpendicular to the longitudinal axis of the central portion. 
   
   
       4 . The polishing article of  claim 3 , wherein the first edge portion and the second edge portion have a same width as the polishing layer. 
   
   
       5 . The polishing article of  claim 1 , wherein the polishing layer and central portion are coextensive. 
   
   
       6 . The polishing article of  claim 1 , wherein the edge extends perpendicular to the longitudinal axis of the central portion and the edge portion extends longitudinally from the edge. 
   
   
       7 . The polishing article of  claim 6 , wherein latitudinal edges of the edge portion are aligned with latitudinal edges of the central portion. 
   
   
       8 . The polishing article of  claim 7 , wherein the edge portion has a same width as the polishing layer. 
   
   
       9 . The polishing article of  claim 1 , further comprising a backing layer. 
   
   
       10 . The polishing article of  claim 9 , wherein the backing layer spans the polishing layer and extends past the edge of the central portion to provide the edge portion. 
   
   
       11 . The polishing article of  claim 9 , wherein the backing layer is coextensive with the polishing layer. 
   
   
       12 . The polishing article of  claim 11 , wherein the edge portion comprises a separate sheet secured to the backing layer. 
   
   
       13 . The polishing article of  claim 12 , wherein the edge portion is secured to the backing layer with an adhesive tape. 
   
   
       14 . The polishing article of  claim 1 , wherein the central portion consists of the polishing layer and the polishing layer consists of a single layer. 
   
   
       15 . The polishing article of  claim 14 , wherein the edge portion comprises a separate sheet secured to the central portion. 
   
   
       16 . The polishing article of  claim 1 , wherein the edge portion comprises a separate sheet secured to the central portion. 
   
   
       17 . The polishing article of  claim 1 , wherein the edge portion is transparent. 
   
   
       18 . The polishing article of  claim 1 , wherein the edge portion is more flexible than the polishing layer. 
   
   
       19 . The polishing article of  claim 1 , wherein the polishing layer comprises a porous polyurethane. 
   
   
       20 . The polishing article of  claim 1 , wherein the edge portion comprises polyethylene terephthalate. 
   
   
       21 . The polishing article of  claim 1 , wherein a bottom surface of the edge portion is coplanar with a bottom surface of the central portion. 
   
   
       22 . The polishing article of  claim 1 , wherein the central portion has a length between about twenty and thirty feet. 
   
   
       23 . The polishing article of  claim 22 , wherein the edge portion has a length of about six feet. 
   
   
       24 . A polishing sheet assembly, comprising:
 an elongate, planar, substantially rectangular, polishing layer having a polishing surface, said polishing layer having two distal ends; and   a continuous, unbroken support sheet spanning and secured to the polishing layer, said support sheet having two distal ends, at least one distal end of the support sheet extending beyond an associated distal end of the polishing layer for attachment to a roller.   
   
   
       25 . The polishing sheet assembly of  claim 24 , wherein the two distal ends of the support sheet extend beyond the two distal ends of the polishing layer. 
   
   
       26 . The polishing sheet assembly of  claim 24 , wherein the polishing layer is adhesively bonded to the support sheet. 
   
   
       27 . A polishing sheet assembly, comprising:
 an elongate, planar, substantially rectangular polishing layer, said polishing layer having two distal ends;   a continuous, unbroken support sheet spanning and secured to the polishing layer, the support sheet coterminous with the polishing layer; and   an attachment sheet abutting and secured to the support sheet at one of the distal ends for attachment to a roller.   
   
   
       28 . The polishing sheet assembly of  claim 27 , further comprising a second attachment sheet abutting and secured to another of the distal ends of the support sheet. 
   
   
       29 . The polishing sheet assembly of  claim 27 , wherein the attachment sheet is secured to the support sheet by a tape. 
   
   
       30 . A polishing sheet assembly, comprising:
 an elongate, planar, substantially rectangular polishing layer, said polishing layer having two distal ends; and   an attachment sheet abutting and secured to one of the distal ends of the polishing layer for attachment to a roller.   
   
   
       31 . The polishing sheet assembly of  claim 30 , further comprising a second attachment sheet abutting and secured to another of the distal ends of the polishing layer. 
   
   
       32 . The polishing sheet assembly of  claim 30 , wherein the attachment sheet is secured to the polishing layer by a tape.

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