US2009079451A1PendingUtilityA1

High frequency probe

Assignee: CASCADE MICROTECH INCPriority: Jun 8, 2005Filed: Sep 12, 2008Published: Mar 26, 2009
Est. expiryJun 8, 2025(expired)· nominal 20-yr term from priority
G01R 1/06772
42
PatentIndex Score
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Cited by
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References
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Claims

Abstract

A high frequency probe has contact tips located within the periphery of a terminal section of a coaxial cable and shielded by a ground conductor of the coaxial cable.

Claims

exact text as granted — not AI-modified
1 . A probe comprising:
 (a) a coaxial cable including an axially extending first conductor, a coaxial second conductor and a dielectric, said coaxial cable terminating in an oblique terminal section;   (b) a dielectric substrate affixed to said coaxial cable with a first side proximate said terminal section and a second side remote from said terminal section;   (c) a first conductive member conductively connecting said first conductor to a first contact located on said second side of said dielectric substrate and substantially within a periphery of said terminal section, said first contact engageable with a device to be tested; and   (d) a second conductive member conductively connecting said second conductor to a second contact located on said second side of said dielectric substrate and substantially within said periphery of said terminal section.   
   
   
       2 . The probe of  claim 1  wherein said first conductive member is located substantially within said periphery of said terminal section. 
   
   
       3 . The probe of  claim 2  wherein said second conductive member is located substantially within said periphery of said terminal section. 
   
   
       4 . The probe of  claim 1  further comprising a third contact conductively connected to said second conductor and located substantially within said periphery of said terminal section on said second side of said dielectric substrate. 
   
   
       5 . The probe of  claim 4  wherein said conductive connection of said third contact to said second conductor is located substantially within said periphery of said terminal section. 
   
   
       6 . The probe of  claim 1  wherein said oblique terminal section comprises: (a) a first oblique substantially planar section of said coaxial cable; and (b) an intersecting second oblique section of said coaxial cable. 
   
   
       7 . The probe of  claim 6  wherein said second oblique section intersects said first oblique planar section proximate said first contact. 
   
   
       8 . The probe of  claim 6  wherein said second oblique section is substantially normal to said first oblique planar section. 
   
   
       9 . The probe of  claim 1  wherein said second conductive member further comprises a planar portion adjacent to but free of conductive connection with said first contact. 
   
   
       10 . The probe of  claim 9  wherein said second conductive member is conductively connected to a ground. 
   
   
       11 . The probe of  claim 1  wherein said dielectric substrate comprises:
 (a) a first dielectric layer having a first side and a second side;   (b) a conductive layer having a first side in contact with said second side of said first dielectric layer and a second side; and   (c) a second dielectric layer having a first side in contact with said second side of conductive layer and a second side.   
   
   
       12 . The probe of  claim 1  wherein one of said first and said second conductive members comprises:
 (a) a contact tip; and   (b) a substantially planar conductive shield conductively connected to said contact tip and electrically isolated from the other of said first and said second conductive members, said conductive shield coextensive with a greater area of said terminal section than an area of said contact tip.   
   
   
       13 . A probe comprising:
 (a) a coaxial cable including an axially extending first conductor and a coaxial second conductor   (b) a first contact tip conductively connected to said first conductor; and   (c) a second contact tip conductively connected to said second conductor, crosstalk between said second contact tip of said probe and a contact tip of an substantially similar probe, spaced 150 micrometers apart on a ground structure from said second contact, being less than −42 dB for an applied signal frequency of 30 gigahertz.   
   
   
       14 . The probe of  claim 11  wherein said crosstalk is less than −47 dB for said applied signal frequency of 30 gigahertz. 
   
   
       15 . The probe of  claim 11  wherein said crosstalk is less than −50 dB for said applied signal frequency of 30 gigahertz. 
   
   
       16 . A probe comprising:
 (a) a coaxial cable including an axially extending first conductor, a coaxial second conductor conductively connected to a ground, and a dielectric, said coaxial cable terminating in an oblique terminal section;   (b) a first contact located substantially within a periphery of said terminal section and conductively connected said first conductor, said first contact engageable with a device to be tested; and   (c) a conductive member conductively connecting said second conductor to a second contact located substantially within said periphery of said terminal section, said conductive member including a substantially planar conductor located proximate to but conductively disconnected from said first contact.   
   
   
       17 . The probe of  claim 16  wherein said conductive member is located substantially within said periphery of said terminal section. 
   
   
       18 . The probe of  claim 16  further comprising a second conductive member conductively connecting said second conductor to a third contact located substantially within said periphery of said terminal section, said second conductive member including a substantially planar conductor located proximate to but conductively disconnected from said first contact. 
   
   
       19 . The probe of  claim 16  wherein said oblique terminal section comprises an oblique substantially planar first section of said coaxial cable intersected by a second oblique section of said coaxial cable. 
   
   
       20 . The probe of  claim 19  wherein said second oblique section intersects said first section proximate said first contact.

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