Cooling apparatus

Abstract

A cooling apparatus which stably cools a target. The cooling apparatus includes a primary circuit that has a first heat exchanging section which is provided at a heat exchanger, and vaporizes a liquid-phase primary coolant to be a gas-phase primary coolant, and a condenser which condenses the gas-phase primary coolant to be the liquid-phase primary coolant, and lets the liquid-phase primary coolant flow to the first heat exchanging section from the condenser through a liquid piping and lets the gas-phase primary coolant flow to the condenser from the first heat exchanging section through a gas piping. The cooling apparatus further includes a secondary circuit having a second heat exchanging section, an expansion valve, an evaporator, and a compressor connected together by a coolant piping.

1 . A cooling apparatus comprising:
 a primary circuit that has a first heat exchanging section which is provided at a heat exchanger, and vaporizes a liquid-phase coolant to be a gas-phase coolant, and a condenser which condenses the gas-phase coolant to be the liquid-phase coolant, and lets the liquid-phase coolant flow to the first heat exchanging section from the condenser through a liquid piping and lets the gas-phase coolant flow to the condenser from the first heat exchanging section through a gas piping;   a secondary circuit having a second heat exchanging section, a restriction section, an evaporator, and a compressor connected together by a coolant piping, the second heat exchanging section being provided at the heat exchanger independently of the first heat exchanging section and being cooled by heat exchange with the coolant flowing to the first heat exchanging section; and   a flow rate regulating section capable of regulating a flow rate of the liquid-phase coolant, and being interposed at the liquid piping.   
   
   
       2 . The cooling apparatus according to  claim 1 , wherein a pump which feeds the liquid-phase coolant toward the first heat exchanging section under pressure and is capable of regulating a flow rate of the liquid-phase coolant to be fed under pressure is used as the flow rate regulating section. 
   
   
       3 . The cooling apparatus according to  claim 2 , wherein a pair of temperature measuring sections set apart from each other in a flow direction of a coolant in a passage thereof are provided in the condenser along the passage, and driving of the pump is controlled based on a difference between temperatures measured by the pair of temperature measuring sections. 
   
   
       4 . The cooling apparatus according to  claim 1 , wherein the condenser is arranged at a position higher than the first heat exchanging section, and a flow rate regulating valve capable of regulating a flow rate of the liquid-phase coolant flowing in the liquid piping is used as the flow rate regulating section. 
   
   
       5 . The cooling apparatus according to  claim 4 , wherein a rise portion is provided at the liquid piping between an outlet side of the condenser and the flow rate regulating valve.