US2009057375A1PendingUtilityA1

Method of improving surface roughness of fluid flow conduits within a diffusion bonded fluid flow structure

Assignee: APPLIED MATERIALS INCPriority: May 31, 2007Filed: Oct 21, 2008Published: Mar 5, 2009
Est. expiryMay 31, 2027(~0.8 yrs left)· nominal 20-yr term from priority
B23K 20/021
56
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Claims

Abstract

The present invention relates to a method of diffusion bonding sheets of patterned material to fabricate a fluid delivery system; and particularly relates to a method of improving the interior surface roughness of fluid flow conduits formed within the diffusion bonded fluid delivery system structure.

Claims

exact text as granted — not AI-modified
1 - 24 . (canceled) 
   
   
       25 . A method of improving the surface roughness of a fluid flow conduit within a diffusion bonded fluid flow handling structure, when the diffusion bonding is carried out using a uni-axially loaded bonding process, the method comprising:
 a. selecting a plurality of patterned sheets which are to be diffusion bonded to provide a fluid flow conduit;   b. determining dimensions and location of pattern features within a stack of individual patterned sheets which are to be bonded to create said fluid flow conduit;   c. diffusion bonding said plurality of patterned sheets using said uni-axially loaded bonding process;   d. measuring at least a portion of dimensions and locations of pattern features for at least a portion of said patterned sheets after said diffusion bonding;   e. calculating a relative change in dimension and location for a portion of the patterned features at different locations within said stack of individual patterned sheets;   f. calculating a revised pattern for each of the patterned sheets, which revised pattern compensates for changes in dimension and location of pattern features which will occur when the patterned sheet is diffusion bonded; and   g. using a plurality of patterned sheets having a revised pattern to fabricate a diffusion bonded fluid flow handling structure, whereby a surface roughness of a fluid flow conduit within said diffusion bonded fluid flow handling structure is reduced.   
   
   
       26 . A method in accordance with  claim 25 , wherein said patterned sheets are comprised of a material selected from the group consisting of stainless steel 316 or UNS S31600, stainless steel 316L or UNS S31603, stainless steel 317L or UNS S31703, stainless steel 317 LN or UNS S31726, Avesta® 254SMO or UNS S31254, Avesta® A16XN or N08367, austenitic-ferritic Duplex® 2205 or UNS S32205, Duplex® 2507 or UNS S32750, Iconel® 625 or UNS N06625, Hastelloy® C22 or UNS N06022, Elgiloy® or UNS R30003, and combinations thereof. 
   
   
       27 . A method in accordance with  claim 26 , wherein said patterned sheets are comprised of a material selected from the group consisting of stainless steel 316 or UNS S31600, stainless steel 316L or UNS S31603, stainless steel 317L or UNS S31703, and stainless steel 317 LN or UNS S31726. 
   
   
       28 . A method in accordance with  claim 25 , wherein the amount of crush during diffusion bonding over the full interval of bonding time ranges between 0.75% to about 3.5%. 
   
   
       29 . A method in accordance with  claim 28 , wherein the amount of crush during diffusion bonding ranges between about 1.5% and about 3.0%. 
   
   
       30 . A method in accordance with  claim 26 , wherein the amount of crush during diffusion bonding over the full interval of bonding time ranges between 0.75% to about 3.5%. 
   
   
       31 . A method in accordance with  claim 30 , wherein the amount of crush during diffusion bonding ranges between about 1.5% and about 3.0%. 
   
   
       32 . A method in accordance with  claim 27 , wherein the amount of crush during diffusion bonding over the full interval of bonding time ranges between 0.75% to about 3.5%. 
   
   
       33 . A method in accordance with  claim 32 , wherein the amount of crush during diffusion bonding ranges between about 1.5% and about 3.0%.

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