Exhaust gas purifier

Abstract

An exhaust gas purer ( 100 ) includes a plasma reactor ( 10 ) that includes a plasma generating electrode ( 1 ) formed by hierarchically stacking a plurality of unit electrodes ( 2 ) at specific intervals, the plasma reactor generating plasma in a space formed between the unit electrodes ( 2 ) by applying a pulse voltage between the unit electrodes ( 2 ) so that exhaust gas can be treated via a reactions and a power supply that generates the pulse voltage, each of the unit electrodes ( 2 ) including a conductive film ( 4 ) and a dielectric ( 3 ) disposed on at least one side of the conductive film ( 4 ), the unit electrodes ( 2 ) being stacked so that the dielectric ( 3 ) is positioned on at least one of opposing sides of the unit electrodes ( 2 ), the pulse voltage having a pulse width of 1 μm to 1 mm and a field intensity of 5 kV/cm or more, and the amount of energy supplied when applying the pulse voltage being 10 J or less per microgram of a treatment target substance. The exhaust gas purifier can efficiently remove particulate matter via a reaction when introducing a treatment target fluid containing particulate matter into the exhaust gas purifier.

1 - 5 . (canceled) 
   
   
       6 . An exhaust gas purifier comprising:
 a plasma reactor that includes a plasma generating electrode formed by hierarchically stacking a plurality of unit electrodes at specific intervals, the plasma reactor generating plasma in a space formed between the unit electrodes by applying a pulse voltage between the unit electrodes so that exhaust gas introduced into the space can be treated via a reaction; and   a power supply that generates the pulse voltage,   each of the unit electrodes including a conductive film and a dielectric disposed on at least one side of the unit electrodes;   the pulse voltage having a pulse width of 1 μs to 1 ms and a field intensity of 5 kV/cm or more; and   the amount of energy supplied when applying the pulse voltage being 10 J or less per microgram of treatment target substance.   
   
   
       7 . The exhaust purifier according to  claim 6 , wherein the pulse voltage has a pulse width of 20 to 50 μs and a field intensity of 10 to 200 kV/cm, and the amount of energy supplied is 0.05 to 10 J or less per microgram of the treatment target substance. 
   
   
       8 . The exhaust gas purifier according to  claim 6 , wherein the distance between the adjacent unit electrodes is 2 mm or less. 
   
   
       9 . The exhaust gas purifier according to  claim 6 , wherein a pulse cycle when applying the pulse voltage is 10 μs to 10 ms. 
   
   
       10 . The exhaust gas purifier according to  claim 6 , wherein a rise time of the pulse voltage is 100 μs or less.