Ultrasonic-wave washing unit, ultrasonic-wave washing apparatus, ultrasonic-wave washing method, method of manufacturing a semiconductor device, and method of manufacturing a liquid crystal display

Abstract

An ultrasonic-wave washing unit comprising an ultrasonic-wave vibrating plate to which an ultrasonic-wave vibrator is fixed by adhesive bonding, an ultrasonic-wave transmission plate opposed to the vibrating plate, a liquid supply means which supplies a liquid to a space defined between the vibrating plate and the transmission plate, and a liquid discharge means for discharging the liquid from the space.

1 .- 6 . (canceled) 
   
   
       7 . An ultrasonic-wave washing method comprising:
 moving an ultrasonic-wave washing unit relatively to a to-be-washed surface of a to-be-washed object held by means of a retaining means, the washing unit having a diffusion means, which has one surface to which an ultrasonic-wave vibrator is fixed and the other surface opposed to the to-be-washed object and diffuses ultrasonic vibration from the ultrasonic-wave vibrator, and a cooling means which cools the diffusion means, thereby bringing the other surface of the diffusion means to a given distance from the to-be-washed surface;   a step of supplying a detergent to the to-be-washed surface, thereby filling the gap between the to-be-washed surface and the other surface of the diffusion means with the detergent; and   a step of driving the ultrasonic-wave vibrator to diffuse and propagate the ultrasonic vibration propagated through the diffusion means to the to-be-washed surface, thereby washing the to-be-washed surface.   
   
   
       8 .- 16 . (canceled)