Heat treatment apparatus

Abstract

Provided is a heat treatment apparatus. The heat treatment apparatus includes a heating plate including a heater; a chamber case including a cooling chamber, and coupled to a lower portion of the heating plate; and at least one atomizing unit installed on the chamber case to generate liquid droplet aerosol by mixing a cooling liquid and a gas, and at the same time, to inject the liquid droplet aerosol into the cooling chamber.

1 . A cooling method of a heat treatment apparatus, which includes a cooling chamber under a heating plate and cools down the heating plate by injecting liquid droplet aerosol that is formed by mixing a cooling liquid and a gas into the cooling chamber, the method comprising:
 cooling the heating plate by continuously injecting the liquid droplet aerosol into the cooling chamber for a predetermined period; and   removing vapor remaining in the cooling chamber by injecting only the gas into the cooling chamber.   
   
   
       2 . The method of  claim 1 , wherein the gas is dry air. 
   
   
       3 . A cooling method of a heat treatment apparatus, which includes a cooling chamber under a heating plate and cools down the heating plate by injecting liquid droplet aerosol that is formed by mixing a cooling liquid and a gas into the cooling chamber, the method comprising:
 cooling the heating plate by injecting the liquid droplet aerosol in a pulse form into the cooling chamber for a predetermined period; and   removing vapor remaining in the cooling chamber by injecting only the gas into the cooling chamber.   
   
   
       4 . The method of  claim 3 , wherein the injecting of the liquid droplet aerosol in a pulse form includes supplying the cooling liquid in a pulse form and supplying the gas continuously into the cooling chamber for a predetermined period. 
   
   
       5 . The method of  claim 3 , wherein the gas is dry air.