Electric comb driven micropump system

Abstract

An electric comb driven micropump system includes a piston, a comb actuator comb and a real-time monitoring device. The comb actuator may generate an electrostatic force after receiving a voltage, so as to actuate the piston to make a first displacement, which causes a fluid to enter into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity, and wherein as the voltage value of the voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity. The real-time monitoring device provides real-time information of the comb actuator.

1 . An electric comb driven micropump system, including:
 a piston;   a comb actuator comb for generating an electrostatic force after receiving a voltage, so as to actuate the piston to make a first displacement, which causes a fluid to enter into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity, and wherein as the voltage value of the voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity; and   a real-time monitoring device for providing real-time information of the comb actuator.   
   
   
       2 . An electric comb driven micropump system of  claim 1 , further including a voltage control device for gradually decreasing the voltage value. 
   
   
       3 . A micropump, including:
 a piston; and   a comb actuator comb for generating an electrostatic force after receiving a voltage, so as to actuate the piston to make a first displacement, which causes a fluid to enter into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity, and wherein as the voltage value of the voltage gradually decreases, the electrostatic forces also decreases, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity.   
   
   
       4 . A micropump system of  claim 3 , further including a voltage control device for changing the voltage value, so as to change the volume of the fluid entering into the cavity. 
   
   
       5 . A micropump system of  claim 3 , wherein the cavity is a cavity with no valve. 
   
   
       6 . A micropump system of  claim 3 , wherein the fluid enters the cavity through an inlet. 
   
   
       7 . A micropump system of  claim 6 , wherein the fluid exits the cavity through an outlet. 
   
   
       8 . A micropump system of  claim 7 , wherein there is a specific angle between the entering direction of the inlet and the exit direction of the outlet, such that the flowing direction of the fluid is controlled. 
   
   
       9 . An actuating method of a micropump, including:
 applying a voltage to a comb actuator to generate an electrostatic force for actuating a piston, allowing the piston to make a first displacement for causing a fluid to flow into a cavity, wherein the voltage has a voltage value for determining the volume of the fluid entering into the cavity; and   gradually decreasing the voltage to reduce the electrostatic forces, allowing the piston to gradually make a second displacement in a direction opposite to the first displacement driven by a spring, thus outputting the fluid from the cavity   
   
   
       10 . An actuating method of a micropump of  claim 9 , further including a voltage control device for changing the voltage value, so as to change the volume of the fluid entering into the cavity. 
   
   
       11 . An actuating method of a micropump of  claim 9 , wherein the cavity is a cavity with no valve. 
   
   
       12 . An actuating method of a micropump of  claim 9 , wherein the fluid enters the cavity through an inlet. 
   
   
       13 . An actuating method of a micropump of  claim 12 , wherein the fluid exits the cavity through an outlet. 
   
   
       14 . An actuating method of a micropump of  claim 3 , wherein there is a specific angle between the entering direction of the inlet and the exit direction of the outlet, such that the flowing direction of the fluid is controlled.