Template Having a Silicon Nitride, Silicon Carbide or Silicon Oxynitride Film

Abstract

An imprint lithography template including, inter alia, a body having a first thickness associated therewith; a patterning layer, having a second thickness associated therewith, comprising a plurality of features, having a third thickness associated therewith, wherein said second thickness is defined by: c 1 ×d<t<a/c 2 ; wherein d is said first thickness, t is said second thickness, a is said third thickness, c 1 has a value greater than 20, and c 2 has a value greater than 350.

1 . An imprint lithography template comprising:
 an imprint lithography template body having a first thickness associated therewith;   an imprint lithography template patterning layer, having a second thickness associated therewith, comprising a plurality of features, having a third thickness associated therewith, wherein said second thickness is defined by:
     c   1   ×d<t<a/c   2    
   wherein d is said first thickness, t is said second thickness, a is said third thickness, c 1  has a value greater than 20, and c 2  has a value greater than 350.   
     
     
         2 . The template as recited in  claim 1  said plurality of features comprises a plurality of protrusions and recessions. 
     
     
         3 . The template as recited in  claim 1  further including an over-coat layer, with said imprint lithography template patterning layer being positioned between said imprint lithography template body and said over-coat layer, with said over-coat layer facilitating separation from a material in contact with said imprint lithography template. 
     
     
         4 . The template as recited in  claim 1  further including an over-coat layer, with said imprint lithography template patterning layer being positioned between said imprint lithography template body and said over-coat layer, with said over-coat layer facilitating wetting of a material in contact with said imprint lithography template. 
     
     
         5 . An imprint lithography template comprising:
 an imprint lithography template body having a first thickness associated therewith;   an imprint lithography template patterning layer, having a second thickness associated therewith, comprising a plurality of features, having a third thickness associated therewith, wherein said second thickness is defined by:
     c   1   ×d<t<a/c   2    
   wherein d is said first thickness, t is said second thickness, a is said third thickness, c 1  has a value greater than 20, and c 2  has a value greater than 350, with said imprint lithography template patterning layer comprising a material selected from a set of materials consisting of silicon nitride, silicon oxynitride, and silicon carbide.   
     
     
         6 . The template as recited in  claim 5  wherein said second thickness has a magnitude such that stress and thermal distortions thereof are minimized. 
     
     
         7 . The template as recited in  claim 5  said plurality of features comprising a plurality of protrusions and recessions. 
     
     
         8 . The template as recited in  claim 5  further including an over-coat layer, with said imprint lithography template patterning layer being positioned between said body and said over-coat layer, with said over-coat layer facilitating separation from a material in contact with said template. 
     
     
         9 . The template as recited in  claim 5  further including an over-coat layer, with said imprint lithography template patterning layer being positioned between said body and said over-coat layer, with said over-coat layer facilitating wetting of a material in contact with said template. 
     
     
         10 . An imprint lithography template comprising:
 an imprint lithography template body having a first thickness associated therewith;   an imprint lithography template patterning layer, having a second thickness associated therewith, comprising a plurality of features, having a third thickness associated therewith, wherein said second thickness is defined by:
     c   1   ×d<t<a/c   2    
   wherein d is said first thickness, t is said second thickness, a is said third thickness, c 1  has a value greater than 20, and c 2  has a value greater than 350, with said second thickness having a magnitude such that stress and thermal distortions thereof are minimized.   
     
     
         11 . The template as recited in  claim 10  said plurality of features comprises a plurality of protrusions and recessions. 
     
     
         12 . The template as recited in  claim 10  further including an over-coat layer, with said imprint lithography template patterning layer being positioned between said body and said over-coat layer, with said over-coat layer facilitating separation from a material in contact with said template. 
     
     
         13 . The template as recited in  claim 10  further including an over-coat layer, with said imprint lithography template patterning layer being positioned between said body and said over-coat layer, with said over-coat layer facilitating wetting of a material in contact with said template.