Manifold assembly

Abstract

Embodiments of a manifold assembly are provided herein. In some embodiments, a manifold assembly includes a first manifold having a first inlet, for coupling to a high temperature fluid source, and a first outlet; a second manifold having a second inlet and a second outlet; and a connector portion coupling the first outlet of the first manifold to the second inlet of the second manifold, the connector portion includes a polymer block; and a thermal isolator disposed between the polymer block and the first manifold.

1 . A manifold assembly, comprising:
 a first manifold having a first inlet, for coupling to a high temperature fluid source, and a first outlet;   a second manifold having a second inlet and a second outlet; and   a connector portion coupling the first outlet of the first manifold to the second inlet of the second manifold, the connector portion comprising:
 a polymer block; and 
 a thermal isolator disposed between the polymer block and the first manifold. 
   
   
   
       2 . The manifold assembly of  claim 1 , wherein the polymer block comprises polytetrafluoroethylene (PTFE). 
   
   
       3 . The manifold assembly of  claim 1 , wherein the thermal isolator comprises ceramic. 
   
   
       4 . The manifold assembly of  claim 1 , wherein the high temperature fluid source is a remote plasma source. 
   
   
       5 . The manifold assembly of  claim 1 , wherein second manifold further comprises a plurality of cooling channels formed therein. 
   
   
       6 . The manifold assembly of  claim 1 , wherein second manifold further comprises a second inlet for coupling to a second fluid source. 
   
   
       7 . The manifold assembly of  claim 1 , wherein first manifold comprises aluminum. 
   
   
       8 . The manifold assembly of  claim 1 , wherein second manifold comprises aluminum. 
   
   
       9 . The manifold assembly of  claim 1 , further comprising:
 a tube disposed within the polymer block.   
   
   
       10 . The manifold assembly of  claim 9 , wherein the tube comprises aluminum. 
   
   
       11 . The manifold assembly of  claim 9 , wherein the tube extends into the second manifold. 
   
   
       12 . A substrate processing apparatus, comprising:
 a process chamber;   a remote plasma source; and   a manifold assembly coupling the remote plasma source to the chamber, the manifold assembly comprising:
 a first manifold having a first inlet, for coupling to the remote plasma source, and a first outlet; 
 a second manifold having a second inlet and a second outlet; and 
 a connector portion coupling the first outlet of the first manifold to the second inlet of the second manifold, the connector portion comprising:
 a polymer block; and 
 a thermal isolator disposed between the polymer block and the first manifold. 
 
   
   
   
       13 . The substrate processing apparatus of  claim 12 , wherein the polymer block comprises polytetrafluoroethylene (PTFE). 
   
   
       14 . The substrate processing apparatus of  claim 12 , wherein the thermal isolator comprises ceramic. 
   
   
       15 . The substrate processing apparatus of  claim 12 , wherein second manifold further comprises a plurality of cooling channels formed therein. 
   
   
       16 . The substrate processing apparatus of  claim 12 , wherein second manifold further comprises a second inlet for coupling to a second fluid source. 
   
   
       17 . The substrate processing apparatus of  claim 12 , wherein first manifold comprises aluminum. 
   
   
       18 . The substrate processing apparatus of  claim 12 , wherein second manifold comprises aluminum. 
   
   
       19 . The substrate processing apparatus of  claim 12  further comprising a tube disposed within the polymer block. 
   
   
       20 . The substrate processing apparatus of  claim 19 , wherein the tube comprises aluminum. 
   
   
       21 . The substrate processing apparatus of  claim 19 , wherein the tube extends into the second manifold.