Temperature control device

Abstract

A temperature control device controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object. The temperature control device comprises a heating pathway that heats and circulates the fluid in the temperature adjustment unit, a cooling pathway that cools and circulates the fluid in the temperature adjustment unit, a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and adjustment means that adjust a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit via a confluence unit that combines these flows. The adjustment means are provided on a downstream side of each of the heating pathway, the cooling pathway, and the bypass pathway and on the upstream side of the confluence unit.

1 . A temperature control device that controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object, comprising:
 a heating pathway that heats and circulates the fluid in the temperature adjustment unit,   a cooling pathway that cools and circulates the fluid in the temperature adjustment unit,   a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and   adjustment means that adjust a flow ratio of the fluid that is supplied from the heating pathway, cooling pathway, and bypass pathway to the temperature adjustment unit via a confluence unit that combines these flows,   wherein the adjustment means are provided on a downstream side of each of the heating pathway, the cooling pathway, and the bypass pathway and on the upstream side of the confluence unit.   
   
   
       2 - 18 . (canceled) 
   
   
       19 . The temperature control device according to  claim 1 , wherein the bypass pathway is shared between the heating pathway and the cooling pathway. 
   
   
       20 . The temperature control device according to  claim 1 , wherein an effusion pathway that diverts the fluid from the adjustment means and effuses the fluid is provided on the upstream side of the heating pathway and the cooling pathway. 
   
   
       21 . The temperature control device according to  claim 1 , further comprising a pump that draws in the fluid downstream from the temperature adjustment unit, and discharges the fluid to the heating pathway, the cooling pathway, and the bypass pathway. 
   
   
       22 . The temperature control device according to  claim 1 , wherein a storage means that stores the fluid is provided on the upstream side of each of the heating pathway, the cooling pathway, and the bypass pathway, and on the downstream side of the temperature adjustment unit, and
 the storage means absorbs a change in the volume of the fluid due to a change in temperature.   
   
   
       23 . The temperature control device according to  claim 1 , further comprising a manipulating means that manipulates the adjustment means so as to control the temperature of the fluid inside and/or near the temperature adjustment unit to a target value. 
   
   
       24 . The temperature control device according to  claim 23 , further comprising a supply temperature detection means that detects the temperature of the fluid inside and/or near the temperature adjustment unit, and the manipulating means feedback controls the value detected by the supply temperature detection means to the target value. 
   
   
       25 . The temperature control device according to  claim 24 , wherein the adjustment means adjusts the downstream side flow dimensions of each of the heating pathway, the cooling pathway, and the bypass pathway, and
 the manipulating means comprises a conversion means that converts an amount based upon a degree of deviation from the target value of the detected value to manipulating variable of the flow ratio of each of the heating pathway, the cooling pathway, and the bypass pathway.   
   
   
       26 . The temperature control device according to  claim 24 , further comprising a bypass temperature detecting means that detects the temperature of the bypass pathway,
 wherein instead of performing feedback control, for a predetermined period of time after a change in the target value, the manipulating means manipulates the adjustment means so as to perform open loop control of the temperature of the fluid inside and/or near the temperature adjustment unit based upon the value detected by the bypass temperature detecting means.   
   
   
       27 . The temperature control device according to  claim 26 , wherein the adjustment means adjusts the downstream side flow dimensions of each of the heating pathway, the cooling pathway, and the bypass pathway, and
 for the predetermined period, the manipulating means open loop controls the temperature of the temperature adjustment unit to the target value by manipulating the adjustment means so as to adjust the flow ratio of the bypass pathway and the cooling pathway if the temperature of the fluid inside the bypass pathway is higher than the target value, and open loop controls the temperature of the temperature adjustment unit to the target value by manipulating the adjustment means so as to adjust the flow ratio of the bypass pathway and the heating pathway if the temperature of the fluid inside the bypass pathway is lower than the target value.   
   
   
       28 . The temperature control device according to  claim 23 , further comprising a transient target value setting means that changes the target value, when a desired temperature of the temperature adjustment unit is changed, so as to be larger than the change of the desired value. 
   
   
       29 . The temperature control device according to  claim 26 , further comprising an open loop control adjustment support means that outputs prompt signals to select any one of a plurality of selections relating to at least one of open loop control gain, the period of time that open loop control is to continue, and the target value during open loop control, and performs temperature control in accordance with the selected value. 
   
   
       30 . The temperature control device according to  claim 23 , wherein the adjustment means adjusts the downstream side flow dimensions of each of the heating pathway, the cooling pathway, and the bypass pathway, and
 the manipulating means prevents the flow ratio of the heating pathway and the cooling pathway that are adjusted by the adjustment means from reaching zero when the temperature inside and/or near the temperature adjustment unit is in a steady state.   
   
   
       31 . A temperature control device that controls the temperature of a controlled object by circulating a fluid in a temperature adjustment unit arranged near the controlled object, comprising:
 a heating pathway that heats and circulates the fluid in the temperature adjustment unit,   a cooling pathway that cools and circulates the fluid in the temperature adjustment unit,   a bypass pathway that does not pass the fluid through the heating pathway and cooling pathway, but circulates the fluid in the temperature adjustment unit, and   adjustment means that adjust the downstream side flow dimensions of each of the heating pathway, cooling pathway, and bypass pathway.   
   
   
       32 . The temperature control device according to  claim 31 , further comprising a manipulating means that manipulates the adjustment means so as to control the temperature of the fluid inside and/or near the temperature adjustment unit to a target value, and a supply temperature detection means that detects the temperature of the fluid inside and/or near the temperature adjustment unit,
 wherein the manipulating means feedback controls the value detected by the supply temperature detection means to the target value.   
   
   
       33 . The temperature control device according to  claim 31 , further comprising a manipulating means that manipulates the adjustment means so as to control the temperature of the fluid inside and/or near the temperature adjustment unit to a target value,
 wherein the manipulating means comprises a conversion means that converts an amount based upon a degree of deviation from the target value of the detected value to manipulating variable of a path dimension for each of the heating pathway, the cooling pathway, and the bypass pathway.   
   
   
       34 . The temperature control device according to  claim 31 , further comprising a manipulating means that manipulates the adjustment means so as to control the temperature of the fluid inside and/or near the temperature adjustment unit to a target value,
 wherein for the predetermined period, the manipulating means open loop controls the temperature of the temperature adjustment unit to the target value by manipulating the adjustment means so as to adjust the path dimensions of the bypass pathway and the cooling pathway if the temperature of the fluid inside the bypass pathway is higher than the target value, and open loop controls the temperature of the temperature adjustment unit to the target value by manipulating the adjustment means so as to adjust the path dimensions of the bypass pathway and the heating pathway if the temperature of the fluid inside the bypass pathway is lower than the target value.   
   
   
       35 . The temperature control device according to  claim 31 , further comprising a manipulating means that manipulates the adjustment means so as to control the temperature of the fluid inside and/or near the temperature adjustment unit to a target value,
 wherein the manipulating means prevents the path dimensions of the heating pathway and the cooling pathway that are adjusted by the adjustment means from reaching zero when the temperature inside and/or near the temperature adjustment unit is in a steady state.