Method for producing piezoelectric film actuator, and composite structure having piezoelectric layer

Abstract

A method for producing a piezoelectric film actuator is provided. This method includes the steps of preparing an intermediate transfer member having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer; bonding the vibrating plate to a nozzle substrate to form a composite structure; and separating the intermediate transfer member from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the nozzle substrate.

1 . A method for producing a piezoelectric film actuator, comprising the steps of:
 preparing a first substrate having a porous layer formed thereon, with a vibrating plate and a piezoelectric layer being provided on the porous layer;   bonding the vibrating plate to a second substrate to form a composite structure; and   separating the first substrate from the composite structure at the porous layer to transfer the vibrating plate and the piezoelectric layer to the second substrate.   
   
   
       2 . The method for producing a piezoelectric film actuator according to  claim 1 , wherein the first substrate comprises silicon. 
   
   
       3 - 10 . (canceled) 
   
   
       11 . The method for producing a piezoelectric film actuator according to  claim 1 , wherein the piezoelectric layer is formed by etching using a resist film as a mask. 
   
   
       12 . The method for producing a piezoelectric film actuator according to  claim 1 , wherein the vibrating plate has a multilayer structure. 
   
   
       13 - 20 . (canceled)